AFM Tip Characterizer fabricated by Si/SiO2 multilayers

Hisataka Takenaka*, Masatoshi Hatayama, Hisashi Ito, Tadayuki Ohchi, Akio Takano, Satoru Kurosawa, Hiroshi Itoh, Shingo Ichimura

*Corresponding author for this work

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2 Citations (Scopus)

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Engineering & Materials Science

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