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AFM Tip Characterizer fabricated by Si/SiO2 multilayers
Hisataka Takenaka*, Masatoshi Hatayama, Hisashi Ito, Tadayuki Ohchi, Akio Takano, Satoru Kurosawa, Hiroshi Itoh, Shingo Ichimura
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
2
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(Scopus)