Abstract
Al 2O 3-cyanate ester hybrid thick films had high Al 2O 3 contents over 75 vol.% were fabricated as 3D integrated substrates. The Al 2O 3-cyanate ester hybrid thick films were completed by resin infiltration of the cyanate ester into the porous Al 2O 3 thick films deposited by aerosol deposition (AD). Al 2O 3 particles were packed as high-density layers in the porous Al 2O 3 thick films by controlling the carrier gas flow rate using AD at room temperature. As dielectric substrate materials, the Al 2O 3-cyanate ester hybrid thick films had dielectric constant of 7.6 and quality (Q) factor of 390, and both were nearly independent of the measuring frequency.
| Original language | English |
|---|---|
| Pages (from-to) | S135-S139 |
| Journal | Ceramics International |
| Volume | 38 |
| Issue number | SUPPL. 1 |
| DOIs | |
| Publication status | Published - 2012 Jan |
| Externally published | Yes |
Keywords
- A. Films
- B. Composites
- D. Al O
- E. Substrates
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Ceramics and Composites
- Process Chemistry and Technology
- Surfaces, Coatings and Films
- Materials Chemistry
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Kim, H. J., Kim, Y. H., Yun, Y. H., & Nam, S. M. (2012). Al 2O 3-cyanate ester hybrid thick films through aerosol deposition and resin infiltration. Ceramics International, 38(SUPPL. 1), S135-S139. https://doi.org/10.1016/j.ceramint.2011.04.067