Al 2O 3-cyanate ester hybrid thick films through aerosol deposition and resin infiltration

Hyung Jun Kim; Yoon Hyun Kim; Young Hoon Yun; Song Min Nam

doi:10.1016/j.ceramint.2011.04.067

Al ₂O ₃-cyanate ester hybrid thick films through aerosol deposition and resin infiltration

Hyung Jun Kim, Yoon Hyun Kim, Young Hoon Yun, Song Min Nam

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Abstract

Al ₂O ₃-cyanate ester hybrid thick films had high Al ₂O ₃ contents over 75 vol.% were fabricated as 3D integrated substrates. The Al ₂O ₃-cyanate ester hybrid thick films were completed by resin infiltration of the cyanate ester into the porous Al ₂O ₃ thick films deposited by aerosol deposition (AD). Al ₂O ₃ particles were packed as high-density layers in the porous Al ₂O ₃ thick films by controlling the carrier gas flow rate using AD at room temperature. As dielectric substrate materials, the Al ₂O ₃-cyanate ester hybrid thick films had dielectric constant of 7.6 and quality (Q) factor of 390, and both were nearly independent of the measuring frequency.

Original language	English
Pages (from-to)	S135-S139
Journal	Ceramics International
Volume	38
Issue number	SUPPL. 1
DOIs	https://doi.org/10.1016/j.ceramint.2011.04.067
Publication status	Published - 2012 Jan
Externally published	Yes

Keywords

A. Films
B. Composites
D. Al O
E. Substrates

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Ceramics and Composites
Process Chemistry and Technology
Surfaces, Coatings and Films
Materials Chemistry

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title = "Al 2O 3-cyanate ester hybrid thick films through aerosol deposition and resin infiltration",

abstract = "Al 2O 3-cyanate ester hybrid thick films had high Al 2O 3 contents over 75 vol.% were fabricated as 3D integrated substrates. The Al 2O 3-cyanate ester hybrid thick films were completed by resin infiltration of the cyanate ester into the porous Al 2O 3 thick films deposited by aerosol deposition (AD). Al 2O 3 particles were packed as high-density layers in the porous Al 2O 3 thick films by controlling the carrier gas flow rate using AD at room temperature. As dielectric substrate materials, the Al 2O 3-cyanate ester hybrid thick films had dielectric constant of 7.6 and quality (Q) factor of 390, and both were nearly independent of the measuring frequency.",

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