Abstract
Al 2O 3-cyanate ester hybrid thick films had high Al 2O 3 contents over 75 vol.% were fabricated as 3D integrated substrates. The Al 2O 3-cyanate ester hybrid thick films were completed by resin infiltration of the cyanate ester into the porous Al 2O 3 thick films deposited by aerosol deposition (AD). Al 2O 3 particles were packed as high-density layers in the porous Al 2O 3 thick films by controlling the carrier gas flow rate using AD at room temperature. As dielectric substrate materials, the Al 2O 3-cyanate ester hybrid thick films had dielectric constant of 7.6 and quality (Q) factor of 390, and both were nearly independent of the measuring frequency.
Original language | English |
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Pages (from-to) | S135-S139 |
Journal | Ceramics International |
Volume | 38 |
Issue number | SUPPL. 1 |
DOIs | |
Publication status | Published - 2012 Jan |
Externally published | Yes |
Keywords
- A. Films
- B. Composites
- D. Al O
- E. Substrates
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Ceramics and Composites
- Process Chemistry and Technology
- Surfaces, Coatings and Films
- Materials Chemistry