Al 2O 3-cyanate ester hybrid thick films through aerosol deposition and resin infiltration

Hyung Jun Kim, Yoon Hyun Kim, Young Hoon Yun, Song Min Nam

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

Al 2O 3-cyanate ester hybrid thick films had high Al 2O 3 contents over 75 vol.% were fabricated as 3D integrated substrates. The Al 2O 3-cyanate ester hybrid thick films were completed by resin infiltration of the cyanate ester into the porous Al 2O 3 thick films deposited by aerosol deposition (AD). Al 2O 3 particles were packed as high-density layers in the porous Al 2O 3 thick films by controlling the carrier gas flow rate using AD at room temperature. As dielectric substrate materials, the Al 2O 3-cyanate ester hybrid thick films had dielectric constant of 7.6 and quality (Q) factor of 390, and both were nearly independent of the measuring frequency.

Original languageEnglish
Pages (from-to)S135-S139
JournalCeramics International
Volume38
Issue numberSUPPL. 1
DOIs
Publication statusPublished - 2012 Jan
Externally publishedYes

Keywords

  • A. Films
  • B. Composites
  • D. Al O
  • E. Substrates

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Ceramics and Composites
  • Process Chemistry and Technology
  • Surfaces, Coatings and Films
  • Materials Chemistry

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