All plastic microfluidic device with built-in 3-D fine microstructures

Hirokazu Matsumura, Hironobu Sato, Yoshitaka Houshi, Shuichi Shoji

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    2 Citations (Scopus)

    Abstract

    This paper presents the fabrication of all plastic microfluidic devices with built-in 3-D fine microstructures. The built-in micromeshes in the microchannel were formed by the combination of the multi-angle inclined backside exposure and top side exposure of thick Epon SU-8 photoresist on a glass substrate. The lift off method, using LOR (Lift-off Resist) as a sacrificial layer, was utilized to remove the all SU-8 device from the substrate. The monolithic plastic structures realize uniform physical and chemical properties required in microfluidic devices for practical applications. Fragmentation of a water droplet in organic carrier formed by two phase flow was demonstrated.

    Original languageEnglish
    Title of host publicationDigest of Papers - Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference
    Pages270-271
    Number of pages2
    Volume2005
    Publication statusPublished - 2005
    Event2005 International Microprocesses and Nanotechnology Conference - Tokyo
    Duration: 2005 Oct 252005 Oct 28

    Other

    Other2005 International Microprocesses and Nanotechnology Conference
    CityTokyo
    Period05/10/2505/10/28

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    ASJC Scopus subject areas

    • Engineering(all)

    Cite this

    Matsumura, H., Sato, H., Houshi, Y., & Shoji, S. (2005). All plastic microfluidic device with built-in 3-D fine microstructures. In Digest of Papers - Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference (Vol. 2005, pp. 270-271). [1595318]