All plastic microfluidic device with built-in 3-D fine microstructures

Hirokazu Matsumura, Hironobu Sato, Yoshitaka Houshi, Shuichi Shoji

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    2 Citations (Scopus)

    Abstract

    This paper presents the fabrication of all plastic microfluidic devices with built-in 3-D fine microstructures. The built-in micromeshes in the microchannel were formed by the combination of the multi-angle inclined backside exposure and top side exposure of thick Epon SU-8 photoresist on a glass substrate. The lift off method, using LOR (Lift-off Resist) as a sacrificial layer, was utilized to remove the all SU-8 device from the substrate. The monolithic plastic structures realize uniform physical and chemical properties required in microfluidic devices for practical applications. Fragmentation of a water droplet in organic carrier formed by two phase flow was demonstrated.

    Original languageEnglish
    Title of host publicationDigest of Papers - Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference
    Pages270-271
    Number of pages2
    Volume2005
    Publication statusPublished - 2005
    Event2005 International Microprocesses and Nanotechnology Conference - Tokyo
    Duration: 2005 Oct 252005 Oct 28

    Other

    Other2005 International Microprocesses and Nanotechnology Conference
    CityTokyo
    Period05/10/2505/10/28

    Fingerprint

    Microfluidics
    Plastics
    Microstructure
    Substrates
    Photoresists
    Microchannels
    Two phase flow
    Chemical properties
    Physical properties
    Fabrication
    Glass
    Water

    ASJC Scopus subject areas

    • Engineering(all)

    Cite this

    Matsumura, H., Sato, H., Houshi, Y., & Shoji, S. (2005). All plastic microfluidic device with built-in 3-D fine microstructures. In Digest of Papers - Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference (Vol. 2005, pp. 270-271). [1595318]

    All plastic microfluidic device with built-in 3-D fine microstructures. / Matsumura, Hirokazu; Sato, Hironobu; Houshi, Yoshitaka; Shoji, Shuichi.

    Digest of Papers - Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference. Vol. 2005 2005. p. 270-271 1595318.

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Matsumura, H, Sato, H, Houshi, Y & Shoji, S 2005, All plastic microfluidic device with built-in 3-D fine microstructures. in Digest of Papers - Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference. vol. 2005, 1595318, pp. 270-271, 2005 International Microprocesses and Nanotechnology Conference, Tokyo, 05/10/25.
    Matsumura H, Sato H, Houshi Y, Shoji S. All plastic microfluidic device with built-in 3-D fine microstructures. In Digest of Papers - Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference. Vol. 2005. 2005. p. 270-271. 1595318
    Matsumura, Hirokazu ; Sato, Hironobu ; Houshi, Yoshitaka ; Shoji, Shuichi. / All plastic microfluidic device with built-in 3-D fine microstructures. Digest of Papers - Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference. Vol. 2005 2005. pp. 270-271
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