An all SU-8 microfluidic chip with built-in 3D fine microstructures

Hironobu Sato, Hirokazu Matsumura, Satoshi Keino, Shuichi Shoji

    Research output: Contribution to journalArticle

    82 Citations (Scopus)

    Abstract

    This paper describes the fabrication method of an all SU-8 microfluidic device with built-in 3D fine micromesh structures. 3D micromesh structures were seamlessly integrated into the SU-8 sealed microchannel. To eliminate gap formation and filling of the microchannel, the built-in micromeshes in the microchannel were formed by photolithography after bonding the SU-8 top-cover layer and the SU-8 bottom substrate. The lift-off method, using lift-off resist as a sacrificial layer, was utilized to release the all SU-8 microfluidic chips. Monolithic SU-8 structures realize uniform physical and chemical surface properties required in microfluidic devices for practical use. As an application, fragmentation of a water droplet in an organic carrier formed by a two-phase flow was demonstrated.

    Original languageEnglish
    Article number010
    Pages (from-to)2318-2322
    Number of pages5
    JournalJournal of Micromechanics and Microengineering
    Volume16
    Issue number11
    DOIs
    Publication statusPublished - 2006 Nov 1

    Fingerprint

    microchannels
    Microchannels
    Microfluidics
    microfluidic devices
    chips
    microstructure
    Microstructure
    Photolithography
    two phase flow
    photolithography
    Two phase flow
    surface properties
    Surface properties
    fragmentation
    fine structure
    Fabrication
    fabrication
    Water
    Substrates
    water

    ASJC Scopus subject areas

    • Instrumentation
    • Materials Science(all)
    • Mechanics of Materials
    • Computational Mechanics

    Cite this

    An all SU-8 microfluidic chip with built-in 3D fine microstructures. / Sato, Hironobu; Matsumura, Hirokazu; Keino, Satoshi; Shoji, Shuichi.

    In: Journal of Micromechanics and Microengineering, Vol. 16, No. 11, 010, 01.11.2006, p. 2318-2322.

    Research output: Contribution to journalArticle

    Sato, Hironobu ; Matsumura, Hirokazu ; Keino, Satoshi ; Shoji, Shuichi. / An all SU-8 microfluidic chip with built-in 3D fine microstructures. In: Journal of Micromechanics and Microengineering. 2006 ; Vol. 16, No. 11. pp. 2318-2322.
    @article{ceca8b3a937745c2a27927b57f32e0a8,
    title = "An all SU-8 microfluidic chip with built-in 3D fine microstructures",
    abstract = "This paper describes the fabrication method of an all SU-8 microfluidic device with built-in 3D fine micromesh structures. 3D micromesh structures were seamlessly integrated into the SU-8 sealed microchannel. To eliminate gap formation and filling of the microchannel, the built-in micromeshes in the microchannel were formed by photolithography after bonding the SU-8 top-cover layer and the SU-8 bottom substrate. The lift-off method, using lift-off resist as a sacrificial layer, was utilized to release the all SU-8 microfluidic chips. Monolithic SU-8 structures realize uniform physical and chemical surface properties required in microfluidic devices for practical use. As an application, fragmentation of a water droplet in an organic carrier formed by a two-phase flow was demonstrated.",
    author = "Hironobu Sato and Hirokazu Matsumura and Satoshi Keino and Shuichi Shoji",
    year = "2006",
    month = "11",
    day = "1",
    doi = "10.1088/0960-1317/16/11/010",
    language = "English",
    volume = "16",
    pages = "2318--2322",
    journal = "Journal of Micromechanics and Microengineering",
    issn = "0960-1317",
    publisher = "IOP Publishing Ltd.",
    number = "11",

    }

    TY - JOUR

    T1 - An all SU-8 microfluidic chip with built-in 3D fine microstructures

    AU - Sato, Hironobu

    AU - Matsumura, Hirokazu

    AU - Keino, Satoshi

    AU - Shoji, Shuichi

    PY - 2006/11/1

    Y1 - 2006/11/1

    N2 - This paper describes the fabrication method of an all SU-8 microfluidic device with built-in 3D fine micromesh structures. 3D micromesh structures were seamlessly integrated into the SU-8 sealed microchannel. To eliminate gap formation and filling of the microchannel, the built-in micromeshes in the microchannel were formed by photolithography after bonding the SU-8 top-cover layer and the SU-8 bottom substrate. The lift-off method, using lift-off resist as a sacrificial layer, was utilized to release the all SU-8 microfluidic chips. Monolithic SU-8 structures realize uniform physical and chemical surface properties required in microfluidic devices for practical use. As an application, fragmentation of a water droplet in an organic carrier formed by a two-phase flow was demonstrated.

    AB - This paper describes the fabrication method of an all SU-8 microfluidic device with built-in 3D fine micromesh structures. 3D micromesh structures were seamlessly integrated into the SU-8 sealed microchannel. To eliminate gap formation and filling of the microchannel, the built-in micromeshes in the microchannel were formed by photolithography after bonding the SU-8 top-cover layer and the SU-8 bottom substrate. The lift-off method, using lift-off resist as a sacrificial layer, was utilized to release the all SU-8 microfluidic chips. Monolithic SU-8 structures realize uniform physical and chemical surface properties required in microfluidic devices for practical use. As an application, fragmentation of a water droplet in an organic carrier formed by a two-phase flow was demonstrated.

    UR - http://www.scopus.com/inward/record.url?scp=33750577829&partnerID=8YFLogxK

    UR - http://www.scopus.com/inward/citedby.url?scp=33750577829&partnerID=8YFLogxK

    U2 - 10.1088/0960-1317/16/11/010

    DO - 10.1088/0960-1317/16/11/010

    M3 - Article

    VL - 16

    SP - 2318

    EP - 2322

    JO - Journal of Micromechanics and Microengineering

    JF - Journal of Micromechanics and Microengineering

    SN - 0960-1317

    IS - 11

    M1 - 010

    ER -