An elastomer-based MEMS fabry-perot interferometer for physical and biological sensing by dry transfer technique

Kazuhiro Takahashi, Toshinori Fujie, Nobutaka Sato, Shinji Takeoka, Kazuaki Sawada

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We developed an elastomer-based Fabry-Perot interferometer with 120-1080 nm gap between a freestanding thin film and a substrate using dry transfer technique. A newly developed elastomeric nanosheet using a polystyrene-polybutadiene-polystyrene triblock copolymer (SBS) provides low Young's modulus of 40 MPa, large elastic strain of 40%, and high adhesiveness. A freestanding SBS nanosheet can be formed by dry transfer technique without vacuum and high temperature processes owing to the high adhesiveness of SBS nanosheet. A minimum gap length of 120 nm with an 80 μm in diameter was achieved. With the pressure change, the freestanding membrane was found to deform with good adhesion between the dry transferred SBS and the substrate.

Original languageEnglish
Title of host publication2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages704-707
Number of pages4
ISBN (Electronic)9781509050789
DOIs
Publication statusPublished - 2017 Feb 23
Event30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017 - Las Vegas, United States
Duration: 2017 Jan 222017 Jan 26

Other

Other30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017
CountryUnited States
CityLas Vegas
Period17/1/2217/1/26

Fingerprint

Elastomers
Fabry-Perot interferometers
Nanosheets
elastomers
microelectromechanical systems
MEMS
polystyrene
Polystyrenes
polybutadiene
modulus of elasticity
copolymers
adhesion
Polybutadienes
Substrates
membranes
vacuum
Block copolymers
Adhesion
thin films
Elastic moduli

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

Takahashi, K., Fujie, T., Sato, N., Takeoka, S., & Sawada, K. (2017). An elastomer-based MEMS fabry-perot interferometer for physical and biological sensing by dry transfer technique. In 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017 (pp. 704-707). [7863505] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2017.7863505

An elastomer-based MEMS fabry-perot interferometer for physical and biological sensing by dry transfer technique. / Takahashi, Kazuhiro; Fujie, Toshinori; Sato, Nobutaka; Takeoka, Shinji; Sawada, Kazuaki.

2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017. Institute of Electrical and Electronics Engineers Inc., 2017. p. 704-707 7863505.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Takahashi, K, Fujie, T, Sato, N, Takeoka, S & Sawada, K 2017, An elastomer-based MEMS fabry-perot interferometer for physical and biological sensing by dry transfer technique. in 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017., 7863505, Institute of Electrical and Electronics Engineers Inc., pp. 704-707, 30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017, Las Vegas, United States, 17/1/22. https://doi.org/10.1109/MEMSYS.2017.7863505
Takahashi K, Fujie T, Sato N, Takeoka S, Sawada K. An elastomer-based MEMS fabry-perot interferometer for physical and biological sensing by dry transfer technique. In 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017. Institute of Electrical and Electronics Engineers Inc. 2017. p. 704-707. 7863505 https://doi.org/10.1109/MEMSYS.2017.7863505
Takahashi, Kazuhiro ; Fujie, Toshinori ; Sato, Nobutaka ; Takeoka, Shinji ; Sawada, Kazuaki. / An elastomer-based MEMS fabry-perot interferometer for physical and biological sensing by dry transfer technique. 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017. Institute of Electrical and Electronics Engineers Inc., 2017. pp. 704-707
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