An elastomer-based MEMS fabry-perot interferometer for physical and biological sensing by dry transfer technique

Kazuhiro Takahashi, Toshinori Fujie, Nobutaka Sato, Shinji Takeoka, Kazuaki Sawada

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

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Chemical Compounds

Engineering & Materials Science

Physics & Astronomy