An expandable Petri Net Framework for method Behavior evaluation of reconfigured equipment

Wan Ling Li, Haw Ching Yang, Tomohiro Murata

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

This paper proposed a design approach for evaluating the feasibility of Reconfigurable Equipment Behavior (REB) based on the Extendable Petri Nets Framework (EPNF). The approach can analyze equipment scenarios through developing and usage phases. Most importantly, EPNF is fully automatic to build a Petri nets (PNs) model according to equipment scenarios of Unified Modeling Language (UML). Moreover, it also can enhance efficiency of production system. Adopting a cluster tool (CT) of semiconductors was presented as a case study to illustrate the proposed approach.

Original languageEnglish
Title of host publicationProceedings of the International MultiConference of Engineers and Computer Scientists 2010, IMECS 2010
Pages1679-1684
Number of pages6
Publication statusPublished - 2010
EventInternational MultiConference of Engineers and Computer Scientists 2010, IMECS 2010 - Kowloon
Duration: 2010 Mar 172010 Mar 19

Other

OtherInternational MultiConference of Engineers and Computer Scientists 2010, IMECS 2010
CityKowloon
Period10/3/1710/3/19

Fingerprint

Petri nets
Unified Modeling Language
Semiconductor materials

Keywords

  • Behavior model
  • Petri-Nets
  • Reconfigurable Equipment

ASJC Scopus subject areas

  • Computer Science (miscellaneous)

Cite this

Li, W. L., Yang, H. C., & Murata, T. (2010). An expandable Petri Net Framework for method Behavior evaluation of reconfigured equipment. In Proceedings of the International MultiConference of Engineers and Computer Scientists 2010, IMECS 2010 (pp. 1679-1684)

An expandable Petri Net Framework for method Behavior evaluation of reconfigured equipment. / Li, Wan Ling; Yang, Haw Ching; Murata, Tomohiro.

Proceedings of the International MultiConference of Engineers and Computer Scientists 2010, IMECS 2010. 2010. p. 1679-1684.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Li, WL, Yang, HC & Murata, T 2010, An expandable Petri Net Framework for method Behavior evaluation of reconfigured equipment. in Proceedings of the International MultiConference of Engineers and Computer Scientists 2010, IMECS 2010. pp. 1679-1684, International MultiConference of Engineers and Computer Scientists 2010, IMECS 2010, Kowloon, 10/3/17.
Li WL, Yang HC, Murata T. An expandable Petri Net Framework for method Behavior evaluation of reconfigured equipment. In Proceedings of the International MultiConference of Engineers and Computer Scientists 2010, IMECS 2010. 2010. p. 1679-1684
Li, Wan Ling ; Yang, Haw Ching ; Murata, Tomohiro. / An expandable Petri Net Framework for method Behavior evaluation of reconfigured equipment. Proceedings of the International MultiConference of Engineers and Computer Scientists 2010, IMECS 2010. 2010. pp. 1679-1684
@inproceedings{90a6633b242340fab010961076d32b74,
title = "An expandable Petri Net Framework for method Behavior evaluation of reconfigured equipment",
abstract = "This paper proposed a design approach for evaluating the feasibility of Reconfigurable Equipment Behavior (REB) based on the Extendable Petri Nets Framework (EPNF). The approach can analyze equipment scenarios through developing and usage phases. Most importantly, EPNF is fully automatic to build a Petri nets (PNs) model according to equipment scenarios of Unified Modeling Language (UML). Moreover, it also can enhance efficiency of production system. Adopting a cluster tool (CT) of semiconductors was presented as a case study to illustrate the proposed approach.",
keywords = "Behavior model, Petri-Nets, Reconfigurable Equipment",
author = "Li, {Wan Ling} and Yang, {Haw Ching} and Tomohiro Murata",
year = "2010",
language = "English",
isbn = "9789881701282",
pages = "1679--1684",
booktitle = "Proceedings of the International MultiConference of Engineers and Computer Scientists 2010, IMECS 2010",

}

TY - GEN

T1 - An expandable Petri Net Framework for method Behavior evaluation of reconfigured equipment

AU - Li, Wan Ling

AU - Yang, Haw Ching

AU - Murata, Tomohiro

PY - 2010

Y1 - 2010

N2 - This paper proposed a design approach for evaluating the feasibility of Reconfigurable Equipment Behavior (REB) based on the Extendable Petri Nets Framework (EPNF). The approach can analyze equipment scenarios through developing and usage phases. Most importantly, EPNF is fully automatic to build a Petri nets (PNs) model according to equipment scenarios of Unified Modeling Language (UML). Moreover, it also can enhance efficiency of production system. Adopting a cluster tool (CT) of semiconductors was presented as a case study to illustrate the proposed approach.

AB - This paper proposed a design approach for evaluating the feasibility of Reconfigurable Equipment Behavior (REB) based on the Extendable Petri Nets Framework (EPNF). The approach can analyze equipment scenarios through developing and usage phases. Most importantly, EPNF is fully automatic to build a Petri nets (PNs) model according to equipment scenarios of Unified Modeling Language (UML). Moreover, it also can enhance efficiency of production system. Adopting a cluster tool (CT) of semiconductors was presented as a case study to illustrate the proposed approach.

KW - Behavior model

KW - Petri-Nets

KW - Reconfigurable Equipment

UR - http://www.scopus.com/inward/record.url?scp=79952411062&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=79952411062&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:79952411062

SN - 9789881701282

SP - 1679

EP - 1684

BT - Proceedings of the International MultiConference of Engineers and Computer Scientists 2010, IMECS 2010

ER -