An expandable Petri Net Framework for method Behavior evaluation of reconfigured equipment

Wan Ling Li, Haw Ching Yang, Tomohiro Murata

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

This paper proposed a design approach for evaluating the feasibility of Reconfigurable Equipment Behavior (REB) based on the Extendable Petri Nets Framework (EPNF). The approach can analyze equipment scenarios through developing and usage phases. Most importantly, EPNF is fully automatic to build a Petri nets (PNs) model according to equipment scenarios of Unified Modeling Language (UML). Moreover, it also can enhance efficiency of production system. Adopting a cluster tool (CT) of semiconductors was presented as a case study to illustrate the proposed approach.

Original languageEnglish
Title of host publicationProceedings of the International MultiConference of Engineers and Computer Scientists 2010, IMECS 2010
Pages1679-1684
Number of pages6
Publication statusPublished - 2010 Dec 1
EventInternational MultiConference of Engineers and Computer Scientists 2010, IMECS 2010 - Kowloon, Hong Kong
Duration: 2010 Mar 172010 Mar 19

Publication series

NameProceedings of the International MultiConference of Engineers and Computer Scientists 2010, IMECS 2010

Other

OtherInternational MultiConference of Engineers and Computer Scientists 2010, IMECS 2010
CountryHong Kong
CityKowloon
Period10/3/1710/3/19

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Keywords

  • Behavior model
  • Petri-Nets
  • Reconfigurable Equipment

ASJC Scopus subject areas

  • Computer Science (miscellaneous)

Cite this

Li, W. L., Yang, H. C., & Murata, T. (2010). An expandable Petri Net Framework for method Behavior evaluation of reconfigured equipment. In Proceedings of the International MultiConference of Engineers and Computer Scientists 2010, IMECS 2010 (pp. 1679-1684). (Proceedings of the International MultiConference of Engineers and Computer Scientists 2010, IMECS 2010).