An extended gate field effect transistor based protein sensor integrated with a SI micro-fluidic channel

Dong Sun Kim, Dae Il Han, Jee Eun Park, Jang Kyoo Shin, Pyung Choi, Jong Hyun Lee, Geunbae Lim, Shuichi Shoji

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    4 Citations (Scopus)

    Abstract

    In this paper, we describe an extended gate field effect transistor (EGFET)-based biosensor for the detection of streptavidin-biotin protein complexes in a silicon microfluidic channel. The connection between EGFET and micro-fluidic system could be achieved with the proposed device, offering merits of isolation between the device and solution, compatibility with the integrated circuit (IC) technology and applicability in the micro total analysis system (μ-TAS). The device was fabricated on the basis of the semiconductor IC fabrication and micro-electro mechanical system (MEMS) technology. Au was used as the extended gate metal to form a self-assembled monolayer (SAM) with thiol. The bindings of SAM, streptavidin and biotin were detected by measuring the electrical characteristics of the FET device.

    Original languageEnglish
    Title of host publicationDigest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05
    Pages2011-2014
    Number of pages4
    Volume2
    Publication statusPublished - 2005
    Event13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05 - Seoul
    Duration: 2005 Jun 52005 Jun 9

    Other

    Other13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05
    CitySeoul
    Period05/6/505/6/9

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    Keywords

    • EGFET
    • FET-type biosensor
    • Micro-fluidic channel
    • Protein complexes
    • Protein sensor

    ASJC Scopus subject areas

    • Engineering(all)

    Cite this

    Kim, D. S., Han, D. I., Park, J. E., Shin, J. K., Choi, P., Lee, J. H., Lim, G., & Shoji, S. (2005). An extended gate field effect transistor based protein sensor integrated with a SI micro-fluidic channel. In Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05 (Vol. 2, pp. 2011-2014). [4D1.4]