An integrated miniature capacitive pressure sensor

Takeshi Kudoh, Shuichi Shoji, Masayoshi Esashi

Research output: Contribution to journalArticle

19 Citations (Scopus)

Abstract

A newly designed capacitive pressure sensor which incorporates a CMOS IC on the same silicon chip has been developed. The sensor chip is 3.3 mm × 3.7 mm × 0.5 mm in size, and both the sensing capacitive element and the electronic circuit are hermetically sealed between the silicon substrate and the glass cover using a unique electrical feedthrough structure. The incorporated electronic circuit is the C-F converter whose oscillation frequency changes as a function of the sensing capacitance. By optimizing the circuit supply voltage, the thermally induced baseline (oscillation frequency at atmospheric pressure) drift can be reduced to within 3.1% F.S. between 20 °C and 50 °C. Since the oscillation frequency can be counted by the consumed current pulses, the pressure waveform can be monitored with only two external leads.

Original languageEnglish
Pages (from-to)185-193
Number of pages9
JournalSensors and Actuators: A. Physical
Volume29
Issue number3
DOIs
Publication statusPublished - 1991
Externally publishedYes

Fingerprint

Capacitive sensors
Pressure sensors
pressure sensors
Silicon
oscillations
Networks (circuits)
chips
silicon
electronics
Atmospheric pressure
converters
CMOS
atmospheric pressure
waveforms
Capacitance
capacitance
Glass
glass
sensors
Sensors

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Instrumentation

Cite this

An integrated miniature capacitive pressure sensor. / Kudoh, Takeshi; Shoji, Shuichi; Esashi, Masayoshi.

In: Sensors and Actuators: A. Physical, Vol. 29, No. 3, 1991, p. 185-193.

Research output: Contribution to journalArticle

Kudoh, Takeshi ; Shoji, Shuichi ; Esashi, Masayoshi. / An integrated miniature capacitive pressure sensor. In: Sensors and Actuators: A. Physical. 1991 ; Vol. 29, No. 3. pp. 185-193.
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