An intelligent bipolar actuation method with high stiction immunity for RF MEMS capacitive switches and variable capacitors

Hiroaki Yamazaki; Tamio Ikehashi; Tatsuya Ohguro; Etsuji Ogawa; Kenji Kojima; Kazunari Ishimaru; Hidemi Ishiuchi

doi:10.1016/j.sna.2007.03.014

An intelligent bipolar actuation method with high stiction immunity for RF MEMS capacitive switches and variable capacitors

Hiroaki Yamazaki^*, Tamio Ikehashi, Tatsuya Ohguro, Etsuji Ogawa, Kenji Kojima, Kazunari Ishimaru, Hidemi Ishiuchi

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

22 Citations (Scopus)

Abstract

We propose an intelligent bipolar actuation (IBA) method for electrostatic actuators, which can suppress stiction induced by dielectric charging. The high stiction immunity is achieved by flipping the bias voltage polarity depending on the pull-out voltage, thereby restricting the amount of charge stored in the dielectric film.

Original language	English
Pages (from-to)	233-236
Number of pages	4
Journal	Sensors and Actuators, A: Physical
Volume	139
Issue number	1-2 SPEC. ISS.
DOIs	https://doi.org/10.1016/j.sna.2007.03.014
Publication status	Published - 2007 Sept 12
Externally published	Yes

Keywords

Capacitive switch
Dielectric charging
Intelligent bipolar actuation
Pull-out voltage
RF MEMS
Stiction
Variable capacitor

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films
Metals and Alloys
Electrical and Electronic Engineering

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10.1016/j.sna.2007.03.014

Cite this

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title = "An intelligent bipolar actuation method with high stiction immunity for RF MEMS capacitive switches and variable capacitors",

abstract = "We propose an intelligent bipolar actuation (IBA) method for electrostatic actuators, which can suppress stiction induced by dielectric charging. The high stiction immunity is achieved by flipping the bias voltage polarity depending on the pull-out voltage, thereby restricting the amount of charge stored in the dielectric film.",

keywords = "Capacitive switch, Dielectric charging, Intelligent bipolar actuation, Pull-out voltage, RF MEMS, Stiction, Variable capacitor",

author = "Hiroaki Yamazaki and Tamio Ikehashi and Tatsuya Ohguro and Etsuji Ogawa and Kenji Kojima and Kazunari Ishimaru and Hidemi Ishiuchi",

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T1 - An intelligent bipolar actuation method with high stiction immunity for RF MEMS capacitive switches and variable capacitors

AU - Yamazaki, Hiroaki

AU - Ikehashi, Tamio

AU - Ohguro, Tatsuya

AU - Ogawa, Etsuji

AU - Kojima, Kenji

AU - Ishimaru, Kazunari

AU - Ishiuchi, Hidemi

PY - 2007/9/12

Y1 - 2007/9/12

N2 - We propose an intelligent bipolar actuation (IBA) method for electrostatic actuators, which can suppress stiction induced by dielectric charging. The high stiction immunity is achieved by flipping the bias voltage polarity depending on the pull-out voltage, thereby restricting the amount of charge stored in the dielectric film.

AB - We propose an intelligent bipolar actuation (IBA) method for electrostatic actuators, which can suppress stiction induced by dielectric charging. The high stiction immunity is achieved by flipping the bias voltage polarity depending on the pull-out voltage, thereby restricting the amount of charge stored in the dielectric film.

KW - Capacitive switch

KW - Dielectric charging

KW - Intelligent bipolar actuation

KW - Pull-out voltage

KW - RF MEMS

KW - Stiction

KW - Variable capacitor

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JO - Sensors and Actuators A: Physical

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ER -

An intelligent bipolar actuation method with high stiction immunity for RF MEMS capacitive switches and variable capacitors

Abstract

Keywords

ASJC Scopus subject areas

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