An intelligent bipolar actuation method with high stiction immunity for RF MEMS capacitive switches and variable capacitors

Hiroaki Yamazaki, Tamio Ikehashi, Tatsuya Ohguro, Etsuji Ogawa, Kenji Kojima, Kazunari Ishimaru, Hidemi Ishiuchi

Research output: Contribution to journalArticle

21 Citations (Scopus)

Abstract

We propose an intelligent bipolar actuation (IBA) method for electrostatic actuators, which can suppress stiction induced by dielectric charging. The high stiction immunity is achieved by flipping the bias voltage polarity depending on the pull-out voltage, thereby restricting the amount of charge stored in the dielectric film.

Original languageEnglish
Pages (from-to)233-236
Number of pages4
JournalSensors and Actuators, A: Physical
Volume139
Issue number1-2 SPEC. ISS.
DOIs
Publication statusPublished - 2007 Sep 12
Externally publishedYes

Fingerprint

stiction
Stiction
immunity
actuation
microelectromechanical systems
MEMS
capacitors
Capacitors
switches
Switches
Electrostatic actuators
Dielectric films
electric potential
Bias voltage
charging
polarity
actuators
electrostatics
Electric potential

Keywords

  • Capacitive switch
  • Dielectric charging
  • Intelligent bipolar actuation
  • Pull-out voltage
  • RF MEMS
  • Stiction
  • Variable capacitor

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering

Cite this

An intelligent bipolar actuation method with high stiction immunity for RF MEMS capacitive switches and variable capacitors. / Yamazaki, Hiroaki; Ikehashi, Tamio; Ohguro, Tatsuya; Ogawa, Etsuji; Kojima, Kenji; Ishimaru, Kazunari; Ishiuchi, Hidemi.

In: Sensors and Actuators, A: Physical, Vol. 139, No. 1-2 SPEC. ISS., 12.09.2007, p. 233-236.

Research output: Contribution to journalArticle

Yamazaki, Hiroaki ; Ikehashi, Tamio ; Ohguro, Tatsuya ; Ogawa, Etsuji ; Kojima, Kenji ; Ishimaru, Kazunari ; Ishiuchi, Hidemi. / An intelligent bipolar actuation method with high stiction immunity for RF MEMS capacitive switches and variable capacitors. In: Sensors and Actuators, A: Physical. 2007 ; Vol. 139, No. 1-2 SPEC. ISS. pp. 233-236.
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