An intermittent free-vibration MEMS gyroscope enabled by catch-and-release mechanism for low-power and fast-startup applications

Ryunosuke Gando, Haruka Kubo, Yasushi Tomizawa, Etsuji Ogawa, Shunta Maeda, Kei Masunishi, Yohei Hatakeyama, Tetsuro Itakura, Tamio Ikehashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

This paper presents the first intermittent free-vibration MEMS gyroscope enabled by a 'Catch-and-Release (CR)' drive mechanism, which realizes substantial power reduction and fast startup compared to existing stationary gyroscopes. In this architecture, the proof mass is captured at the maximum displacement position (catch-state), and then released to free vibration during which the Coriolis detection is performed (release-state). Thanks to the high quality factor (Q) of 72000, the released mass can be re-captured before attenuation. This CR mechanism enables instant startup and low power. The functionality and sensitivity (21.2 μV/dps) of a prototype CR gyroscope (CR-G) are confirmed by experiments.

Original languageEnglish
Title of host publication2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages29-32
Number of pages4
ISBN (Electronic)9781509050789
DOIs
Publication statusPublished - 2017 Feb 23
Externally publishedYes
Event30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017 - Las Vegas, United States
Duration: 2017 Jan 222017 Jan 26

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Other

Other30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017
CountryUnited States
CityLas Vegas
Period17/1/2217/1/26

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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  • Cite this

    Gando, R., Kubo, H., Tomizawa, Y., Ogawa, E., Maeda, S., Masunishi, K., Hatakeyama, Y., Itakura, T., & Ikehashi, T. (2017). An intermittent free-vibration MEMS gyroscope enabled by catch-and-release mechanism for low-power and fast-startup applications. In 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017 (pp. 29-32). [7863331] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2017.7863331