An intermittent free-vibration MEMS gyroscope enabled by catch-and-release mechanism for low-power and fast-startup applications

Ryunosuke Gando, Haruka Kubo, Yasushi Tomizawa, Etsuji Ogawa, Shunta Maeda, Kei Masunishi, Yohei Hatakeyama, Tetsuro Itakura, Tamio Ikehashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

This paper presents the first intermittent free-vibration MEMS gyroscope enabled by a 'Catch-and-Release (CR)' drive mechanism, which realizes substantial power reduction and fast startup compared to existing stationary gyroscopes. In this architecture, the proof mass is captured at the maximum displacement position (catch-state), and then released to free vibration during which the Coriolis detection is performed (release-state). Thanks to the high quality factor (Q) of 72000, the released mass can be re-captured before attenuation. This CR mechanism enables instant startup and low power. The functionality and sensitivity (21.2 μV/dps) of a prototype CR gyroscope (CR-G) are confirmed by experiments.

Original languageEnglish
Title of host publication2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages29-32
Number of pages4
ISBN (Electronic)9781509050789
DOIs
Publication statusPublished - 2017 Feb 23
Externally publishedYes
Event30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017 - Las Vegas, United States
Duration: 2017 Jan 222017 Jan 26

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Other

Other30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017
CountryUnited States
CityLas Vegas
Period17/1/2217/1/26

Fingerprint

free vibration
Gyroscopes
gyroscopes
microelectromechanical systems
MEMS
Q factors
attenuation
prototypes
sensitivity
Experiments

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

Gando, R., Kubo, H., Tomizawa, Y., Ogawa, E., Maeda, S., Masunishi, K., ... Ikehashi, T. (2017). An intermittent free-vibration MEMS gyroscope enabled by catch-and-release mechanism for low-power and fast-startup applications. In 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017 (pp. 29-32). [7863331] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2017.7863331

An intermittent free-vibration MEMS gyroscope enabled by catch-and-release mechanism for low-power and fast-startup applications. / Gando, Ryunosuke; Kubo, Haruka; Tomizawa, Yasushi; Ogawa, Etsuji; Maeda, Shunta; Masunishi, Kei; Hatakeyama, Yohei; Itakura, Tetsuro; Ikehashi, Tamio.

2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017. Institute of Electrical and Electronics Engineers Inc., 2017. p. 29-32 7863331 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Gando, R, Kubo, H, Tomizawa, Y, Ogawa, E, Maeda, S, Masunishi, K, Hatakeyama, Y, Itakura, T & Ikehashi, T 2017, An intermittent free-vibration MEMS gyroscope enabled by catch-and-release mechanism for low-power and fast-startup applications. in 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017., 7863331, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Institute of Electrical and Electronics Engineers Inc., pp. 29-32, 30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017, Las Vegas, United States, 17/1/22. https://doi.org/10.1109/MEMSYS.2017.7863331
Gando R, Kubo H, Tomizawa Y, Ogawa E, Maeda S, Masunishi K et al. An intermittent free-vibration MEMS gyroscope enabled by catch-and-release mechanism for low-power and fast-startup applications. In 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017. Institute of Electrical and Electronics Engineers Inc. 2017. p. 29-32. 7863331. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2017.7863331
Gando, Ryunosuke ; Kubo, Haruka ; Tomizawa, Yasushi ; Ogawa, Etsuji ; Maeda, Shunta ; Masunishi, Kei ; Hatakeyama, Yohei ; Itakura, Tetsuro ; Ikehashi, Tamio. / An intermittent free-vibration MEMS gyroscope enabled by catch-and-release mechanism for low-power and fast-startup applications. 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017. Institute of Electrical and Electronics Engineers Inc., 2017. pp. 29-32 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).
@inproceedings{807a47d09ed1499ea5fc863a1dfe85ed,
title = "An intermittent free-vibration MEMS gyroscope enabled by catch-and-release mechanism for low-power and fast-startup applications",
abstract = "This paper presents the first intermittent free-vibration MEMS gyroscope enabled by a 'Catch-and-Release (CR)' drive mechanism, which realizes substantial power reduction and fast startup compared to existing stationary gyroscopes. In this architecture, the proof mass is captured at the maximum displacement position (catch-state), and then released to free vibration during which the Coriolis detection is performed (release-state). Thanks to the high quality factor (Q) of 72000, the released mass can be re-captured before attenuation. This CR mechanism enables instant startup and low power. The functionality and sensitivity (21.2 μV/dps) of a prototype CR gyroscope (CR-G) are confirmed by experiments.",
author = "Ryunosuke Gando and Haruka Kubo and Yasushi Tomizawa and Etsuji Ogawa and Shunta Maeda and Kei Masunishi and Yohei Hatakeyama and Tetsuro Itakura and Tamio Ikehashi",
year = "2017",
month = "2",
day = "23",
doi = "10.1109/MEMSYS.2017.7863331",
language = "English",
series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "29--32",
booktitle = "2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017",

}

TY - GEN

T1 - An intermittent free-vibration MEMS gyroscope enabled by catch-and-release mechanism for low-power and fast-startup applications

AU - Gando, Ryunosuke

AU - Kubo, Haruka

AU - Tomizawa, Yasushi

AU - Ogawa, Etsuji

AU - Maeda, Shunta

AU - Masunishi, Kei

AU - Hatakeyama, Yohei

AU - Itakura, Tetsuro

AU - Ikehashi, Tamio

PY - 2017/2/23

Y1 - 2017/2/23

N2 - This paper presents the first intermittent free-vibration MEMS gyroscope enabled by a 'Catch-and-Release (CR)' drive mechanism, which realizes substantial power reduction and fast startup compared to existing stationary gyroscopes. In this architecture, the proof mass is captured at the maximum displacement position (catch-state), and then released to free vibration during which the Coriolis detection is performed (release-state). Thanks to the high quality factor (Q) of 72000, the released mass can be re-captured before attenuation. This CR mechanism enables instant startup and low power. The functionality and sensitivity (21.2 μV/dps) of a prototype CR gyroscope (CR-G) are confirmed by experiments.

AB - This paper presents the first intermittent free-vibration MEMS gyroscope enabled by a 'Catch-and-Release (CR)' drive mechanism, which realizes substantial power reduction and fast startup compared to existing stationary gyroscopes. In this architecture, the proof mass is captured at the maximum displacement position (catch-state), and then released to free vibration during which the Coriolis detection is performed (release-state). Thanks to the high quality factor (Q) of 72000, the released mass can be re-captured before attenuation. This CR mechanism enables instant startup and low power. The functionality and sensitivity (21.2 μV/dps) of a prototype CR gyroscope (CR-G) are confirmed by experiments.

UR - http://www.scopus.com/inward/record.url?scp=85015733733&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85015733733&partnerID=8YFLogxK

U2 - 10.1109/MEMSYS.2017.7863331

DO - 10.1109/MEMSYS.2017.7863331

M3 - Conference contribution

AN - SCOPUS:85015733733

T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

SP - 29

EP - 32

BT - 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017

PB - Institute of Electrical and Electronics Engineers Inc.

ER -