An ionization gauge with a cold electron source for an extremely high vacuum

C. Oshima; T. Satoh; A. Otuka

doi:10.1016/0042-207X(93)90104-I

An ionization gauge with a cold electron source for an extremely high vacuum

C. Oshima, T. Satoh, A. Otuka

Waseda University

Research output: Contribution to journal › Article › peer-review

28 Citations (Scopus)

Abstract

An ionization gauge with a cold electron source has been constructed, and its performance has been evaluated. The Spindt emitter used as the cold source has shown the stable emission current of 1 mA, and the low outgas condition has been obtained after the long operation of 1 mA emission for approximately 1 month. Between the cold and hot electron sources, no large difference concerning the stability of the emission and the outgas has been detected in extremely high vacuum of 1 × 10^-10 Pa, and the sensitivity of the gauge with the cold electron source (1.9×10¹⁰ cps Pa^-1 at 0.1 mA reduced for nitrogen gas) was slightly higher than that of the gauge with the hot electron source.

Original language	English
Pages (from-to)	595-597
Number of pages	3
Journal	Vacuum
Volume	44
Issue number	5-7
DOIs	https://doi.org/10.1016/0042-207X(93)90104-I
Publication status	Published - 1993

ASJC Scopus subject areas

Surfaces, Coatings and Films
Condensed Matter Physics
Surfaces and Interfaces

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10.1016/0042-207X(93)90104-I

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title = "An ionization gauge with a cold electron source for an extremely high vacuum",

abstract = "An ionization gauge with a cold electron source has been constructed, and its performance has been evaluated. The Spindt emitter used as the cold source has shown the stable emission current of 1 mA, and the low outgas condition has been obtained after the long operation of 1 mA emission for approximately 1 month. Between the cold and hot electron sources, no large difference concerning the stability of the emission and the outgas has been detected in extremely high vacuum of 1 × 10-10 Pa, and the sensitivity of the gauge with the cold electron source (1.9×1010 cps Pa-1 at 0.1 mA reduced for nitrogen gas) was slightly higher than that of the gauge with the hot electron source.",

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AU - Oshima, C.

AU - Satoh, T.

AU - Otuka, A.

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N2 - An ionization gauge with a cold electron source has been constructed, and its performance has been evaluated. The Spindt emitter used as the cold source has shown the stable emission current of 1 mA, and the low outgas condition has been obtained after the long operation of 1 mA emission for approximately 1 month. Between the cold and hot electron sources, no large difference concerning the stability of the emission and the outgas has been detected in extremely high vacuum of 1 × 10-10 Pa, and the sensitivity of the gauge with the cold electron source (1.9×1010 cps Pa-1 at 0.1 mA reduced for nitrogen gas) was slightly higher than that of the gauge with the hot electron source.

AB - An ionization gauge with a cold electron source has been constructed, and its performance has been evaluated. The Spindt emitter used as the cold source has shown the stable emission current of 1 mA, and the low outgas condition has been obtained after the long operation of 1 mA emission for approximately 1 month. Between the cold and hot electron sources, no large difference concerning the stability of the emission and the outgas has been detected in extremely high vacuum of 1 × 10-10 Pa, and the sensitivity of the gauge with the cold electron source (1.9×1010 cps Pa-1 at 0.1 mA reduced for nitrogen gas) was slightly higher than that of the gauge with the hot electron source.

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SN - 0042-207X

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An ionization gauge with a cold electron source for an extremely high vacuum

Abstract

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