An ionization gauge with a cold electron source for an extremely high vacuum

C. Oshima, T. Satoh, A. Otuka

Research output: Contribution to journalArticle

28 Citations (Scopus)

Abstract

An ionization gauge with a cold electron source has been constructed, and its performance has been evaluated. The Spindt emitter used as the cold source has shown the stable emission current of 1 mA, and the low outgas condition has been obtained after the long operation of 1 mA emission for approximately 1 month. Between the cold and hot electron sources, no large difference concerning the stability of the emission and the outgas has been detected in extremely high vacuum of 1 × 10-10 Pa, and the sensitivity of the gauge with the cold electron source (1.9×1010 cps Pa-1 at 0.1 mA reduced for nitrogen gas) was slightly higher than that of the gauge with the hot electron source.

Original languageEnglish
Pages (from-to)595-597
Number of pages3
JournalVacuum
Volume44
Issue number5-7
DOIs
Publication statusPublished - 1993

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Condensed Matter Physics
  • Surfaces and Interfaces

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