Abstract
An ionization gauge with a cold electron source has been constructed, and its performance has been evaluated. The Spindt emitter used as the cold source has shown the stable emission current of 1 mA, and the low outgas condition has been obtained after the long operation of 1 mA emission for approximately 1 month. Between the cold and hot electron sources, no large difference concerning the stability of the emission and the outgas has been detected in extremely high vacuum of 1 × 10-10 Pa, and the sensitivity of the gauge with the cold electron source (1.9×1010 cps Pa-1 at 0.1 mA reduced for nitrogen gas) was slightly higher than that of the gauge with the hot electron source.
| Original language | English |
|---|---|
| Pages (from-to) | 595-597 |
| Number of pages | 3 |
| Journal | Vacuum |
| Volume | 44 |
| Issue number | 5-7 |
| DOIs | |
| Publication status | Published - 1993 |
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ASJC Scopus subject areas
- Surfaces, Coatings and Films
- Condensed Matter Physics
- Surfaces and Interfaces
Cite this
An ionization gauge with a cold electron source for an extremely high vacuum. / Oshima, C.; Satoh, T.; Otuka, A.
In: Vacuum, Vol. 44, No. 5-7, 1993, p. 595-597.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - An ionization gauge with a cold electron source for an extremely high vacuum
AU - Oshima, C.
AU - Satoh, T.
AU - Otuka, A.
PY - 1993
Y1 - 1993
N2 - An ionization gauge with a cold electron source has been constructed, and its performance has been evaluated. The Spindt emitter used as the cold source has shown the stable emission current of 1 mA, and the low outgas condition has been obtained after the long operation of 1 mA emission for approximately 1 month. Between the cold and hot electron sources, no large difference concerning the stability of the emission and the outgas has been detected in extremely high vacuum of 1 × 10-10 Pa, and the sensitivity of the gauge with the cold electron source (1.9×1010 cps Pa-1 at 0.1 mA reduced for nitrogen gas) was slightly higher than that of the gauge with the hot electron source.
AB - An ionization gauge with a cold electron source has been constructed, and its performance has been evaluated. The Spindt emitter used as the cold source has shown the stable emission current of 1 mA, and the low outgas condition has been obtained after the long operation of 1 mA emission for approximately 1 month. Between the cold and hot electron sources, no large difference concerning the stability of the emission and the outgas has been detected in extremely high vacuum of 1 × 10-10 Pa, and the sensitivity of the gauge with the cold electron source (1.9×1010 cps Pa-1 at 0.1 mA reduced for nitrogen gas) was slightly higher than that of the gauge with the hot electron source.
UR - http://www.scopus.com/inward/record.url?scp=0027589925&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0027589925&partnerID=8YFLogxK
U2 - 10.1016/0042-207X(93)90104-I
DO - 10.1016/0042-207X(93)90104-I
M3 - Article
VL - 44
SP - 595
EP - 597
JO - Vacuum
JF - Vacuum
SN - 0042-207X
IS - 5-7
ER -