An Optically Delineated 4.2-µm2Self-Aligned Isolated-Plate Stacked-Capacitor DRAM Cell

Shin Ichiro Kimura, Yoshifumi Kawamoto, Norio Hasegawa, Atsushi Hiraiwa, Yoshinobu Nakagome, Masakazu Aoki, Hideo Sunami, Kiyoo Itoh, Teruaki Kisu

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6 Citations (Scopus)

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Engineering & Materials Science

Chemical Compounds