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An Optically Delineated 4.2-µm2Self-Aligned Isolated-Plate Stacked-Capacitor DRAM Cell
Shin Ichiro Kimura, Yoshifumi Kawamoto, Norio Hasegawa, Atsushi Hiraiwa, Yoshinobu Nakagome, Masakazu Aoki, Hideo Sunami, Kiyoo Itoh, Teruaki Kisu
Research output: Contribution to journal › Article › peer-review
6
Citations
(Scopus)