An RF-MEMS tunable capacitor using quadruple series capacitor structure and brittle material springs

Hiroaki Yamazaki, Tamio Ikehashi, Tomohiro Saito, Etsuji Ogawa, Takayuki Masunaga, Kei Masunishi, Yasushi Tomizawa, Tatsuya Ohguro, Yoshiaki Sugizaki, Hideki Shibata

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this paper, we show an RF-MEMS tunable capacitor that achieves excellent creep immunity and high power-handling capability. The tunable capacitor has a quadruple series capacitor (QSC) structure. The measured result demonstrates +36dBm hot-switching at 85°C with 21V pull-in voltage. The creep immunity is attained by employing SiN spring at the stress concentrations. Compared with aluminum springs, the creep deformation is reduced by a factor of 23 at 100°C.

Original languageEnglish
Title of host publicationAdvanced Metallization Conference 2010
Pages203-204
Number of pages2
Publication statusPublished - 2010 Dec 1
Externally publishedYes
EventAdvanced Metallization Conference 2010 - Albany, NY, United States
Duration: 2010 Oct 52010 Oct 7

Publication series

NameAdvanced Metallization Conference (AMC)
ISSN (Print)1540-1766

Conference

ConferenceAdvanced Metallization Conference 2010
CountryUnited States
CityAlbany, NY
Period10/10/510/10/7

ASJC Scopus subject areas

  • Materials Science(all)
  • Industrial and Manufacturing Engineering

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