An RF-MEMS tunable capacitor using quadruple series capacitor structure and brittle material springs

Hiroaki Yamazaki, Tamio Ikehashi, Tomohiro Saito, Etsuji Ogawa, Takayuki Masunaga, Kei Masunishi, Yasushi Tomizawa, Tatsuya Ohguro, Yoshiaki Sugizaki, Hideki Shibata

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this paper, we show an RF-MEMS tunable capacitor that achieves excellent creep immunity and high power-handling capability. The tunable capacitor has a quadruple series capacitor (QSC) structure. The measured result demonstrates +36dBm hot-switching at 85°C with 21V pull-in voltage. The creep immunity is attained by employing SiN spring at the stress concentrations. Compared with aluminum springs, the creep deformation is reduced by a factor of 23 at 100°C.

Original languageEnglish
Title of host publicationAdvanced Metallization Conference 2010
Pages203-204
Number of pages2
Publication statusPublished - 2010 Dec 1
Externally publishedYes
EventAdvanced Metallization Conference 2010 - Albany, NY, United States
Duration: 2010 Oct 52010 Oct 7

Publication series

NameAdvanced Metallization Conference (AMC)
ISSN (Print)1540-1766

Conference

ConferenceAdvanced Metallization Conference 2010
CountryUnited States
CityAlbany, NY
Period10/10/510/10/7

Fingerprint

Brittleness
MEMS
Creep
Capacitors
Aluminum
Stress concentration
Electric potential

ASJC Scopus subject areas

  • Materials Science(all)
  • Industrial and Manufacturing Engineering

Cite this

Yamazaki, H., Ikehashi, T., Saito, T., Ogawa, E., Masunaga, T., Masunishi, K., ... Shibata, H. (2010). An RF-MEMS tunable capacitor using quadruple series capacitor structure and brittle material springs. In Advanced Metallization Conference 2010 (pp. 203-204). (Advanced Metallization Conference (AMC)).

An RF-MEMS tunable capacitor using quadruple series capacitor structure and brittle material springs. / Yamazaki, Hiroaki; Ikehashi, Tamio; Saito, Tomohiro; Ogawa, Etsuji; Masunaga, Takayuki; Masunishi, Kei; Tomizawa, Yasushi; Ohguro, Tatsuya; Sugizaki, Yoshiaki; Shibata, Hideki.

Advanced Metallization Conference 2010. 2010. p. 203-204 (Advanced Metallization Conference (AMC)).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Yamazaki, H, Ikehashi, T, Saito, T, Ogawa, E, Masunaga, T, Masunishi, K, Tomizawa, Y, Ohguro, T, Sugizaki, Y & Shibata, H 2010, An RF-MEMS tunable capacitor using quadruple series capacitor structure and brittle material springs. in Advanced Metallization Conference 2010. Advanced Metallization Conference (AMC), pp. 203-204, Advanced Metallization Conference 2010, Albany, NY, United States, 10/10/5.
Yamazaki H, Ikehashi T, Saito T, Ogawa E, Masunaga T, Masunishi K et al. An RF-MEMS tunable capacitor using quadruple series capacitor structure and brittle material springs. In Advanced Metallization Conference 2010. 2010. p. 203-204. (Advanced Metallization Conference (AMC)).
Yamazaki, Hiroaki ; Ikehashi, Tamio ; Saito, Tomohiro ; Ogawa, Etsuji ; Masunaga, Takayuki ; Masunishi, Kei ; Tomizawa, Yasushi ; Ohguro, Tatsuya ; Sugizaki, Yoshiaki ; Shibata, Hideki. / An RF-MEMS tunable capacitor using quadruple series capacitor structure and brittle material springs. Advanced Metallization Conference 2010. 2010. pp. 203-204 (Advanced Metallization Conference (AMC)).
@inproceedings{eeeecfa56b74422c9d3a5b68925e930e,
title = "An RF-MEMS tunable capacitor using quadruple series capacitor structure and brittle material springs",
abstract = "In this paper, we show an RF-MEMS tunable capacitor that achieves excellent creep immunity and high power-handling capability. The tunable capacitor has a quadruple series capacitor (QSC) structure. The measured result demonstrates +36dBm hot-switching at 85°C with 21V pull-in voltage. The creep immunity is attained by employing SiN spring at the stress concentrations. Compared with aluminum springs, the creep deformation is reduced by a factor of 23 at 100°C.",
author = "Hiroaki Yamazaki and Tamio Ikehashi and Tomohiro Saito and Etsuji Ogawa and Takayuki Masunaga and Kei Masunishi and Yasushi Tomizawa and Tatsuya Ohguro and Yoshiaki Sugizaki and Hideki Shibata",
year = "2010",
month = "12",
day = "1",
language = "English",
isbn = "9781617822810",
series = "Advanced Metallization Conference (AMC)",
pages = "203--204",
booktitle = "Advanced Metallization Conference 2010",

}

TY - GEN

T1 - An RF-MEMS tunable capacitor using quadruple series capacitor structure and brittle material springs

AU - Yamazaki, Hiroaki

AU - Ikehashi, Tamio

AU - Saito, Tomohiro

AU - Ogawa, Etsuji

AU - Masunaga, Takayuki

AU - Masunishi, Kei

AU - Tomizawa, Yasushi

AU - Ohguro, Tatsuya

AU - Sugizaki, Yoshiaki

AU - Shibata, Hideki

PY - 2010/12/1

Y1 - 2010/12/1

N2 - In this paper, we show an RF-MEMS tunable capacitor that achieves excellent creep immunity and high power-handling capability. The tunable capacitor has a quadruple series capacitor (QSC) structure. The measured result demonstrates +36dBm hot-switching at 85°C with 21V pull-in voltage. The creep immunity is attained by employing SiN spring at the stress concentrations. Compared with aluminum springs, the creep deformation is reduced by a factor of 23 at 100°C.

AB - In this paper, we show an RF-MEMS tunable capacitor that achieves excellent creep immunity and high power-handling capability. The tunable capacitor has a quadruple series capacitor (QSC) structure. The measured result demonstrates +36dBm hot-switching at 85°C with 21V pull-in voltage. The creep immunity is attained by employing SiN spring at the stress concentrations. Compared with aluminum springs, the creep deformation is reduced by a factor of 23 at 100°C.

UR - http://www.scopus.com/inward/record.url?scp=79957668757&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=79957668757&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:79957668757

SN - 9781617822810

T3 - Advanced Metallization Conference (AMC)

SP - 203

EP - 204

BT - Advanced Metallization Conference 2010

ER -