An RF-MEMS tunable capacitor using quadruple series capacitor structure and brittle material springs

Hiroaki Yamazaki, Tamio Ikehashi, Tomohiro Saito, Etsuji Ogawa, Takayuki Masunaga, Kei Masunishi, Yasushi Tomizawa, Tatsuya Ohguro, Yoshiaki Sugizaki, Hideki Shibata

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Chemical Compounds

Engineering & Materials Science