An RF MEMS variable capacitor with intelligent bipolar actuation

Tamio Ikehashi; Takayuki Miyazaki; Hiroaki Yamazaki; Atsushi Suzuki; Etsuji Ogawa; Shinji Miyano; Tomohiro Saito; Tatsuya Ohgura; Takeshi Miyagi; Yoshiaki Sugizaki; Nobuaki Otsuka; Hideki Shibata; Yoshiaki Toyoshima

doi:10.1109/ISSCC.2008.4523317

An RF MEMS variable capacitor with intelligent bipolar actuation

Tamio Ikehashi, Takayuki Miyazaki, Hiroaki Yamazaki, Atsushi Suzuki, Etsuji Ogawa, Shinji Miyano, Tomohiro Saito, Tatsuya Ohgura, Takeshi Miyagi, Yoshiaki Sugizaki, Nobuaki Otsuka, Hideki Shibata, Yoshiaki Toyoshima^*

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

22 Citations (Scopus)

Abstract

An RF MEMS variable capacitor module with intelligent bipolar actuation (IBA) is implemented in a driver IC to prevent stiction in electrostatic actuators. The IBA eliminates the dielectric charging of the electrostatic actuator by detecting the charge trapped in the dielectric film and reversing the electric field orientation if it exceeds a set threshold. No failure is observed up to 10⁸ cycles at 85°C.

Original language	English
Title of host publication	2008 IEEE International Solid State Circuits Conference - Digest of Technical Papers, ISSCC
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	582-584
Number of pages	3
ISBN (Print)	9781424420100
DOIs	https://doi.org/10.1109/ISSCC.2008.4523317
Publication status	Published - 2008
Externally published	Yes
Event	2008 IEEE International Solid State Circuits Conference, ISSCC - San Francisco, CA, United States Duration: 2008 Feb 3 → 2008 Feb 7

Publication series

Name	Digest of Technical Papers - IEEE International Solid-State Circuits Conference
Volume	51
ISSN (Print)	0193-6530

Conference

Conference	2008 IEEE International Solid State Circuits Conference, ISSCC
Country/Territory	United States
City	San Francisco, CA
Period	08/2/3 → 08/2/7

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering

Access to Document

10.1109/ISSCC.2008.4523317

Cite this

Ikehashi, T., Miyazaki, T., Yamazaki, H., Suzuki, A., Ogawa, E., Miyano, S., Saito, T., Ohgura, T., Miyagi, T., Sugizaki, Y., Otsuka, N., Shibata, H., & Toyoshima, Y. (2008). An RF MEMS variable capacitor with intelligent bipolar actuation. In 2008 IEEE International Solid State Circuits Conference - Digest of Technical Papers, ISSCC (pp. 582-584). [4523317] (Digest of Technical Papers - IEEE International Solid-State Circuits Conference; Vol. 51). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ISSCC.2008.4523317

An RF MEMS variable capacitor with intelligent bipolar actuation. / Ikehashi, Tamio; Miyazaki, Takayuki; Yamazaki, Hiroaki et al.

2008 IEEE International Solid State Circuits Conference - Digest of Technical Papers, ISSCC. Institute of Electrical and Electronics Engineers Inc., 2008. p. 582-584 4523317 (Digest of Technical Papers - IEEE International Solid-State Circuits Conference; Vol. 51).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Ikehashi, T, Miyazaki, T, Yamazaki, H, Suzuki, A, Ogawa, E, Miyano, S, Saito, T, Ohgura, T, Miyagi, T, Sugizaki, Y, Otsuka, N, Shibata, H & Toyoshima, Y 2008, An RF MEMS variable capacitor with intelligent bipolar actuation. in 2008 IEEE International Solid State Circuits Conference - Digest of Technical Papers, ISSCC., 4523317, Digest of Technical Papers - IEEE International Solid-State Circuits Conference, vol. 51, Institute of Electrical and Electronics Engineers Inc., pp. 582-584, 2008 IEEE International Solid State Circuits Conference, ISSCC, San Francisco, CA, United States, 08/2/3. https://doi.org/10.1109/ISSCC.2008.4523317

Ikehashi T, Miyazaki T, Yamazaki H, Suzuki A, Ogawa E, Miyano S et al. An RF MEMS variable capacitor with intelligent bipolar actuation. In 2008 IEEE International Solid State Circuits Conference - Digest of Technical Papers, ISSCC. Institute of Electrical and Electronics Engineers Inc. 2008. p. 582-584. 4523317. (Digest of Technical Papers - IEEE International Solid-State Circuits Conference). doi: 10.1109/ISSCC.2008.4523317

Ikehashi, Tamio ; Miyazaki, Takayuki ; Yamazaki, Hiroaki et al. / An RF MEMS variable capacitor with intelligent bipolar actuation. 2008 IEEE International Solid State Circuits Conference - Digest of Technical Papers, ISSCC. Institute of Electrical and Electronics Engineers Inc., 2008. pp. 582-584 (Digest of Technical Papers - IEEE International Solid-State Circuits Conference).

@inproceedings{ea956420bdd7479586e5b301b9af5d87,

title = "An RF MEMS variable capacitor with intelligent bipolar actuation",

abstract = "An RF MEMS variable capacitor module with intelligent bipolar actuation (IBA) is implemented in a driver IC to prevent stiction in electrostatic actuators. The IBA eliminates the dielectric charging of the electrostatic actuator by detecting the charge trapped in the dielectric film and reversing the electric field orientation if it exceeds a set threshold. No failure is observed up to 108 cycles at 85°C.",

author = "Tamio Ikehashi and Takayuki Miyazaki and Hiroaki Yamazaki and Atsushi Suzuki and Etsuji Ogawa and Shinji Miyano and Tomohiro Saito and Tatsuya Ohgura and Takeshi Miyagi and Yoshiaki Sugizaki and Nobuaki Otsuka and Hideki Shibata and Yoshiaki Toyoshima",

year = "2008",

doi = "10.1109/ISSCC.2008.4523317",

language = "English",

isbn = "9781424420100",

series = "Digest of Technical Papers - IEEE International Solid-State Circuits Conference",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "582--584",

booktitle = "2008 IEEE International Solid State Circuits Conference - Digest of Technical Papers, ISSCC",

note = "2008 IEEE International Solid State Circuits Conference, ISSCC ; Conference date: 03-02-2008 Through 07-02-2008",

}

TY - GEN

T1 - An RF MEMS variable capacitor with intelligent bipolar actuation

AU - Ikehashi, Tamio

AU - Miyazaki, Takayuki

AU - Yamazaki, Hiroaki

AU - Suzuki, Atsushi

AU - Ogawa, Etsuji

AU - Miyano, Shinji

AU - Saito, Tomohiro

AU - Ohgura, Tatsuya

AU - Miyagi, Takeshi

AU - Sugizaki, Yoshiaki

AU - Otsuka, Nobuaki

AU - Shibata, Hideki

AU - Toyoshima, Yoshiaki

PY - 2008

Y1 - 2008

N2 - An RF MEMS variable capacitor module with intelligent bipolar actuation (IBA) is implemented in a driver IC to prevent stiction in electrostatic actuators. The IBA eliminates the dielectric charging of the electrostatic actuator by detecting the charge trapped in the dielectric film and reversing the electric field orientation if it exceeds a set threshold. No failure is observed up to 108 cycles at 85°C.

AB - An RF MEMS variable capacitor module with intelligent bipolar actuation (IBA) is implemented in a driver IC to prevent stiction in electrostatic actuators. The IBA eliminates the dielectric charging of the electrostatic actuator by detecting the charge trapped in the dielectric film and reversing the electric field orientation if it exceeds a set threshold. No failure is observed up to 108 cycles at 85°C.

UR - http://www.scopus.com/inward/record.url?scp=49549093625&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=49549093625&partnerID=8YFLogxK

U2 - 10.1109/ISSCC.2008.4523317

DO - 10.1109/ISSCC.2008.4523317

M3 - Conference contribution

AN - SCOPUS:49549093625

SN - 9781424420100

T3 - Digest of Technical Papers - IEEE International Solid-State Circuits Conference

SP - 582

EP - 584

BT - 2008 IEEE International Solid State Circuits Conference - Digest of Technical Papers, ISSCC

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 2008 IEEE International Solid State Circuits Conference, ISSCC

Y2 - 3 February 2008 through 7 February 2008

ER -

An RF MEMS variable capacitor with intelligent bipolar actuation

Abstract

Publication series

Conference

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this