An RF MEMS variable capacitor with intelligent bipolar actuation

Tamio Ikehashi, Takayuki Miyazaki, Hiroaki Yamazaki, Atsushi Suzuki, Etsuji Ogawa, Shinji Miyano, Tomohiro Saito, Tatsuya Ohgura, Takeshi Miyagi, Yoshiaki Sugizaki, Nobuaki Otsuka, Hideki Shibata, Yoshiaki Toyoshima

Research output: Chapter in Book/Report/Conference proceedingConference contribution

21 Citations (Scopus)

Abstract

An RF MEMS variable capacitor module with intelligent bipolar actuation (IBA) is implemented in a driver IC to prevent stiction in electrostatic actuators. The IBA eliminates the dielectric charging of the electrostatic actuator by detecting the charge trapped in the dielectric film and reversing the electric field orientation if it exceeds a set threshold. No failure is observed up to 108 cycles at 85°C.

Original languageEnglish
Title of host publication2008 IEEE International Solid State Circuits Conference - Digest of Technical Papers, ISSCC
DOIs
Publication statusPublished - 2008 Aug 21
Externally publishedYes
Event2008 IEEE International Solid State Circuits Conference, ISSCC - San Francisco, CA, United States
Duration: 2008 Feb 32008 Feb 7

Publication series

NameDigest of Technical Papers - IEEE International Solid-State Circuits Conference
Volume51
ISSN (Print)0193-6530

Conference

Conference2008 IEEE International Solid State Circuits Conference, ISSCC
CountryUnited States
CitySan Francisco, CA
Period08/2/308/2/7

Fingerprint

Electrostatic actuators
MEMS
Capacitors
Stiction
Dielectric films
Electric fields

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

Cite this

Ikehashi, T., Miyazaki, T., Yamazaki, H., Suzuki, A., Ogawa, E., Miyano, S., ... Toyoshima, Y. (2008). An RF MEMS variable capacitor with intelligent bipolar actuation. In 2008 IEEE International Solid State Circuits Conference - Digest of Technical Papers, ISSCC [4523317] (Digest of Technical Papers - IEEE International Solid-State Circuits Conference; Vol. 51). https://doi.org/10.1109/ISSCC.2008.4523317

An RF MEMS variable capacitor with intelligent bipolar actuation. / Ikehashi, Tamio; Miyazaki, Takayuki; Yamazaki, Hiroaki; Suzuki, Atsushi; Ogawa, Etsuji; Miyano, Shinji; Saito, Tomohiro; Ohgura, Tatsuya; Miyagi, Takeshi; Sugizaki, Yoshiaki; Otsuka, Nobuaki; Shibata, Hideki; Toyoshima, Yoshiaki.

2008 IEEE International Solid State Circuits Conference - Digest of Technical Papers, ISSCC. 2008. 4523317 (Digest of Technical Papers - IEEE International Solid-State Circuits Conference; Vol. 51).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Ikehashi, T, Miyazaki, T, Yamazaki, H, Suzuki, A, Ogawa, E, Miyano, S, Saito, T, Ohgura, T, Miyagi, T, Sugizaki, Y, Otsuka, N, Shibata, H & Toyoshima, Y 2008, An RF MEMS variable capacitor with intelligent bipolar actuation. in 2008 IEEE International Solid State Circuits Conference - Digest of Technical Papers, ISSCC., 4523317, Digest of Technical Papers - IEEE International Solid-State Circuits Conference, vol. 51, 2008 IEEE International Solid State Circuits Conference, ISSCC, San Francisco, CA, United States, 08/2/3. https://doi.org/10.1109/ISSCC.2008.4523317
Ikehashi T, Miyazaki T, Yamazaki H, Suzuki A, Ogawa E, Miyano S et al. An RF MEMS variable capacitor with intelligent bipolar actuation. In 2008 IEEE International Solid State Circuits Conference - Digest of Technical Papers, ISSCC. 2008. 4523317. (Digest of Technical Papers - IEEE International Solid-State Circuits Conference). https://doi.org/10.1109/ISSCC.2008.4523317
Ikehashi, Tamio ; Miyazaki, Takayuki ; Yamazaki, Hiroaki ; Suzuki, Atsushi ; Ogawa, Etsuji ; Miyano, Shinji ; Saito, Tomohiro ; Ohgura, Tatsuya ; Miyagi, Takeshi ; Sugizaki, Yoshiaki ; Otsuka, Nobuaki ; Shibata, Hideki ; Toyoshima, Yoshiaki. / An RF MEMS variable capacitor with intelligent bipolar actuation. 2008 IEEE International Solid State Circuits Conference - Digest of Technical Papers, ISSCC. 2008. (Digest of Technical Papers - IEEE International Solid-State Circuits Conference).
@inproceedings{ea956420bdd7479586e5b301b9af5d87,
title = "An RF MEMS variable capacitor with intelligent bipolar actuation",
abstract = "An RF MEMS variable capacitor module with intelligent bipolar actuation (IBA) is implemented in a driver IC to prevent stiction in electrostatic actuators. The IBA eliminates the dielectric charging of the electrostatic actuator by detecting the charge trapped in the dielectric film and reversing the electric field orientation if it exceeds a set threshold. No failure is observed up to 108 cycles at 85°C.",
author = "Tamio Ikehashi and Takayuki Miyazaki and Hiroaki Yamazaki and Atsushi Suzuki and Etsuji Ogawa and Shinji Miyano and Tomohiro Saito and Tatsuya Ohgura and Takeshi Miyagi and Yoshiaki Sugizaki and Nobuaki Otsuka and Hideki Shibata and Yoshiaki Toyoshima",
year = "2008",
month = "8",
day = "21",
doi = "10.1109/ISSCC.2008.4523317",
language = "English",
isbn = "9781424420100",
series = "Digest of Technical Papers - IEEE International Solid-State Circuits Conference",
booktitle = "2008 IEEE International Solid State Circuits Conference - Digest of Technical Papers, ISSCC",

}

TY - GEN

T1 - An RF MEMS variable capacitor with intelligent bipolar actuation

AU - Ikehashi, Tamio

AU - Miyazaki, Takayuki

AU - Yamazaki, Hiroaki

AU - Suzuki, Atsushi

AU - Ogawa, Etsuji

AU - Miyano, Shinji

AU - Saito, Tomohiro

AU - Ohgura, Tatsuya

AU - Miyagi, Takeshi

AU - Sugizaki, Yoshiaki

AU - Otsuka, Nobuaki

AU - Shibata, Hideki

AU - Toyoshima, Yoshiaki

PY - 2008/8/21

Y1 - 2008/8/21

N2 - An RF MEMS variable capacitor module with intelligent bipolar actuation (IBA) is implemented in a driver IC to prevent stiction in electrostatic actuators. The IBA eliminates the dielectric charging of the electrostatic actuator by detecting the charge trapped in the dielectric film and reversing the electric field orientation if it exceeds a set threshold. No failure is observed up to 108 cycles at 85°C.

AB - An RF MEMS variable capacitor module with intelligent bipolar actuation (IBA) is implemented in a driver IC to prevent stiction in electrostatic actuators. The IBA eliminates the dielectric charging of the electrostatic actuator by detecting the charge trapped in the dielectric film and reversing the electric field orientation if it exceeds a set threshold. No failure is observed up to 108 cycles at 85°C.

UR - http://www.scopus.com/inward/record.url?scp=49549093625&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=49549093625&partnerID=8YFLogxK

U2 - 10.1109/ISSCC.2008.4523317

DO - 10.1109/ISSCC.2008.4523317

M3 - Conference contribution

SN - 9781424420100

T3 - Digest of Technical Papers - IEEE International Solid-State Circuits Conference

BT - 2008 IEEE International Solid State Circuits Conference - Digest of Technical Papers, ISSCC

ER -