An RF MEMS variable capacitor with intelligent bipolar actuation

Tamio Ikehashi, Takayuki Miyazaki, Hiroaki Yamazaki, Atsushi Suzuki, Etsuji Ogawa, Shinji Miyano, Tomohiro Saito, Tatsuya Ohgura, Takeshi Miyagi, Yoshiaki Sugizaki, Nobuaki Otsuka, Hideki Shibata, Yoshiaki Toyoshima

Research output: Chapter in Book/Report/Conference proceedingConference contribution

22 Citations (Scopus)

Abstract

An RF MEMS variable capacitor module with intelligent bipolar actuation (IBA) is implemented in a driver IC to prevent stiction in electrostatic actuators. The IBA eliminates the dielectric charging of the electrostatic actuator by detecting the charge trapped in the dielectric film and reversing the electric field orientation if it exceeds a set threshold. No failure is observed up to 108 cycles at 85°C.

Original languageEnglish
Title of host publication2008 IEEE International Solid State Circuits Conference - Digest of Technical Papers, ISSCC
Pages582-583+575+637
DOIs
Publication statusPublished - 2008 Aug 21
Event2008 IEEE International Solid State Circuits Conference, ISSCC - San Francisco, CA, United States
Duration: 2008 Feb 32008 Feb 7

Publication series

NameDigest of Technical Papers - IEEE International Solid-State Circuits Conference
Volume51
ISSN (Print)0193-6530

Conference

Conference2008 IEEE International Solid State Circuits Conference, ISSCC
CountryUnited States
CitySan Francisco, CA
Period08/2/308/2/7

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ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

Cite this

Ikehashi, T., Miyazaki, T., Yamazaki, H., Suzuki, A., Ogawa, E., Miyano, S., Saito, T., Ohgura, T., Miyagi, T., Sugizaki, Y., Otsuka, N., Shibata, H., & Toyoshima, Y. (2008). An RF MEMS variable capacitor with intelligent bipolar actuation. In 2008 IEEE International Solid State Circuits Conference - Digest of Technical Papers, ISSCC (pp. 582-583+575+637). [4523317] (Digest of Technical Papers - IEEE International Solid-State Circuits Conference; Vol. 51). https://doi.org/10.1109/ISSCC.2008.4523317