An RFMEMS switched capacitor array for a tunable band pass filter

S. S. Lee*, H. Uchida, S. Soda, T. Nishino, H. Inoue, S. Izuo, Y. Yoshida, M. Miyazaki

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

8 Citations (Scopus)

Abstract

In this paper, we present an RFMEMS switched capacitor array, which is proposed as a RF component to achieve various kinds of tunable RF filters. Our RFMEMS switched capacitor array consists of RFMEMS direct contact switches and metal-insulator-metal capacitors. In order to obtain reliable capacitors, the metal sacrificial layer for the RFMEMS switch fabrication is also applied to the capacitor implementation. We have achieved a C- to Ku-band tunable band pass filter by using the RFMEMS switched capacitor array. The capacitance of capacitor is designed corresponding to each tuning state of the band pass filter, which is selected by the RFMEMS switch operation. The insertion losses of the band pass filter were 7.1dB, 4.9dB and 6.2dB at 8GHz, 12GHz and 16GHz, respectively.

Original languageEnglish
Title of host publicationTRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
Pages157-160
Number of pages4
DOIs
Publication statusPublished - 2007
Externally publishedYes
Event4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07 - Lyon, France
Duration: 2007 Jun 102007 Jun 14

Publication series

NameTRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Conference

Conference4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07
Country/TerritoryFrance
CityLyon
Period07/6/1007/6/14

Keywords

  • Reliable capacitor
  • RFMEMS switch
  • Tunable band pass filter

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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