Analytical studies on multiple delta doping in diamond thin films for efficient hole excitation and conductivity enhancement

Takeshi Kobayashi*, Takuya Ariki, Mamoru Iwabuchi, Tetsuro Maki, Shozo Shikama, Sei Suzuki

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

37 Citations (Scopus)

Abstract

Beneficial features of boron multiple delta doping (MDD) in synthetic diamond thin films are studied analytically and compared with MDD in GaAs. In spite of a deep boron level (∼0.3 eV), MDD greatly helps the thermal excitation of holes via elevation of the Fermi level toward the acceptor boron level. Thus, a hole excitation 6-7 times higher than that of the uniformly doped one is obtained. Furthermore, more than 90% of holes are in the spacer layer (i-diamond) where the mobility is high, resulting in a film conductance of the MDD structure more than 20 times higher than that of the conventional one when the same amount of boron is uniformly doped.

Original languageEnglish
Pages (from-to)1977-1979
Number of pages3
JournalJournal of Applied Physics
Volume76
Issue number3
DOIs
Publication statusPublished - 1994 Dec 1
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Fingerprint

Dive into the research topics of 'Analytical studies on multiple delta doping in diamond thin films for efficient hole excitation and conductivity enhancement'. Together they form a unique fingerprint.

Cite this