Anatase-type TiO2 thin films produced by lattice deformation

Wataru Sugimura, Atsushi Yamazaki, Hisashi Shigetani, Junzo Tanaka, Takefumi Mitsuhashi

    Research output: Contribution to journalArticle

    43 Citations (Scopus)

    Abstract

    TiO2 thin films were grown onto SrTiO3 substrates by a molecular beam epitaxy (MBE) method using an oxygen radical source. The structure of the thin films obtained was evaluated by X-ray reflection diffractometer (XRD) and reflection high energy electron diffraction (RHEED); TiO2 thin films were determined to be of anatase type and were epitaxially grown in the direction of the c-axis, parallel to the [001] of the substrates. Near the interface, the a-value of thin films increased and the c-value shrank in comparison to that of anatase powder. These results indicated that the anatase phase of TiO2 was induced by a lattice matching process at the interface between SrTiO3 and TiO2.

    Original languageEnglish
    Pages (from-to)7358-7359
    Number of pages2
    JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
    Volume36
    Issue number12 A
    Publication statusPublished - 1997 Dec

    Fingerprint

    anatase
    Titanium dioxide
    Thin films
    thin films
    Reflection high energy electron diffraction
    Diffractometers
    Substrates
    diffractometers
    Molecular beam epitaxy
    high energy electrons
    molecular beam epitaxy
    electron diffraction
    Powders
    X rays
    Oxygen
    oxygen
    x rays

    Keywords

    • Anatase
    • Lattice mismatch
    • Molecular beam epitaxy
    • Thin film
    • TiO

    ASJC Scopus subject areas

    • Physics and Astronomy (miscellaneous)
    • Engineering(all)

    Cite this

    Anatase-type TiO2 thin films produced by lattice deformation. / Sugimura, Wataru; Yamazaki, Atsushi; Shigetani, Hisashi; Tanaka, Junzo; Mitsuhashi, Takefumi.

    In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, Vol. 36, No. 12 A, 12.1997, p. 7358-7359.

    Research output: Contribution to journalArticle

    Sugimura, Wataru ; Yamazaki, Atsushi ; Shigetani, Hisashi ; Tanaka, Junzo ; Mitsuhashi, Takefumi. / Anatase-type TiO2 thin films produced by lattice deformation. In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers. 1997 ; Vol. 36, No. 12 A. pp. 7358-7359.
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