Abstract
TiO2 thin films were grown onto SrTiO3 substrates by a molecular beam epitaxy (MBE) method using an oxygen radical source. The structure of the thin films obtained was evaluated by X-ray reflection diffractometer (XRD) and reflection high energy electron diffraction (RHEED); TiO2 thin films were determined to be of anatase type and were epitaxially grown in the direction of the c-axis, parallel to the [001] of the substrates. Near the interface, the a-value of thin films increased and the c-value shrank in comparison to that of anatase powder. These results indicated that the anatase phase of TiO2 was induced by a lattice matching process at the interface between SrTiO3 and TiO2.
| Original language | English |
|---|---|
| Pages (from-to) | 7358-7359 |
| Number of pages | 2 |
| Journal | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers |
| Volume | 36 |
| Issue number | 12 A |
| Publication status | Published - 1997 Dec 1 |
Keywords
- Anatase
- Lattice mismatch
- Molecular beam epitaxy
- Thin film
- TiO
ASJC Scopus subject areas
- Engineering(all)
- Physics and Astronomy(all)
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Sugimura, W., Yamazaki, A., Shigetani, H., Tanaka, J., & Mitsuhashi, T. (1997). Anatase-type TiO2 thin films produced by lattice deformation. Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 36(12 A), 7358-7359.