Application of 100% ozone gas process to rapid low-temperature oxidation

H. Nonaka, Shingo Ichimura, T. Nishiguchi, Y. Morikawa, M. Kekura, M. Miyamoto

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Fingerprint Dive into the research topics of 'Application of 100% ozone gas process to rapid low-temperature oxidation'. Together they form a unique fingerprint.

Engineering & Materials Science