Abstract
Oxide materials have superior functional characteristics that are attributed to their versatile structures and chemically stable characteristics. These characteristics are expected to enable their employment as the functional device materials that are required to support the ubiquitous society. The aerosol deposition method is a nanocrystalline film forming method that employs the impact solidification phenomenon of ultra fine particles. This method enables the formation of oxide films onto any type of substrate. NEC and NEC TOKIN are co-developing piezoelectric and optical device products to be used in the aerosol deposition.
| Original language | English |
|---|---|
| Pages (from-to) | 76-80 |
| Number of pages | 5 |
| Journal | NEC Technical Journal |
| Volume | 2 |
| Issue number | 1 |
| Publication status | Published - 2007 Dec 1 |
| Externally published | Yes |
Keywords
- Aerosol deposition
- Electric field sensor
- Fiber sensor
- Film forming technology
- Optical modulator
- Piezoelectric device
ASJC Scopus subject areas
- Information Systems
- Materials Science(all)
- Hardware and Architecture
- Electrical and Electronic Engineering