APPLICATION OF MONTE CARLO CALCULATION TECHNIQUE TO QUANTITATIVE ANALYSES BY AUGER ELECTRON SPECTROSCOPY.

Ryuichi Shimizu, Shingo Ichimura, Mikio Aratama

Research output: Contribution to conferencePaper

1 Citation (Scopus)

Abstract

A basic study is provided of the atomic number effect for quantitative AES analyses by Monte Carlo calculation technique. Since the direct simulation of each individual inelastic scattering process used in the previous papers applies to only a few materials, the authors have attempted to incorporate a semi-empirical stopping power formula proposed by E. R. Krefting and L. Reimer instead of the individual inelastic scattering. The result describes the dependence of Auger electron intensity on primary energy obtained with a commercial SAM, JEOL JAMP III, with considerable accuracy.

Original languageEnglish
Pages30-34
Number of pages5
Publication statusPublished - 1979 Jan 1
Externally publishedYes
EventProc Annu Conf Microbeam Anal Soc 14th - San Antonio, Tex
Duration: 1979 Aug 121979 Aug 17

Other

OtherProc Annu Conf Microbeam Anal Soc 14th
CitySan Antonio, Tex
Period79/8/1279/8/17

Fingerprint

Inelastic scattering
Auger electron spectroscopy
Electrons

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Shimizu, R., Ichimura, S., & Aratama, M. (1979). APPLICATION OF MONTE CARLO CALCULATION TECHNIQUE TO QUANTITATIVE ANALYSES BY AUGER ELECTRON SPECTROSCOPY.. 30-34. Paper presented at Proc Annu Conf Microbeam Anal Soc 14th, San Antonio, Tex, .

APPLICATION OF MONTE CARLO CALCULATION TECHNIQUE TO QUANTITATIVE ANALYSES BY AUGER ELECTRON SPECTROSCOPY. / Shimizu, Ryuichi; Ichimura, Shingo; Aratama, Mikio.

1979. 30-34 Paper presented at Proc Annu Conf Microbeam Anal Soc 14th, San Antonio, Tex, .

Research output: Contribution to conferencePaper

Shimizu, R, Ichimura, S & Aratama, M 1979, 'APPLICATION OF MONTE CARLO CALCULATION TECHNIQUE TO QUANTITATIVE ANALYSES BY AUGER ELECTRON SPECTROSCOPY.' Paper presented at Proc Annu Conf Microbeam Anal Soc 14th, San Antonio, Tex, 79/8/12 - 79/8/17, pp. 30-34.
Shimizu R, Ichimura S, Aratama M. APPLICATION OF MONTE CARLO CALCULATION TECHNIQUE TO QUANTITATIVE ANALYSES BY AUGER ELECTRON SPECTROSCOPY.. 1979. Paper presented at Proc Annu Conf Microbeam Anal Soc 14th, San Antonio, Tex, .
Shimizu, Ryuichi ; Ichimura, Shingo ; Aratama, Mikio. / APPLICATION OF MONTE CARLO CALCULATION TECHNIQUE TO QUANTITATIVE ANALYSES BY AUGER ELECTRON SPECTROSCOPY. Paper presented at Proc Annu Conf Microbeam Anal Soc 14th, San Antonio, Tex, .5 p.
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