APPLICATION OF MONTE CARLO TECHNIQUE TO QUANTITATIVE AUGER ANALYSIS - APPROACH FOR QUANTITATIVE CORRECTION OF ELECTRON BACKSCATTERING EFFECT.

Ryuichi Shimizu, Shingo Ichimura

Research output: Contribution to journalArticle

Abstract

This work briefly reviews studies of the backscattering effect and then presents the authors most recent theoretical results that should lead to more accurate quantitative AES analysis. These theoretical results were obtained from Monte Carlo calculations based on the use of more precise theoretical expressions for both the elastic and inelastic scattering; i. e. , elastic scattering cross-sections calculated by the partial wave expansion method and Gryzinski's excitation function combined with Bethe's stopping power, respectively.

Original languageEnglish
Pages (from-to)221-230
Number of pages10
JournalScanning Electron Microscopy
Publication statusPublished - 1981 Jan 1

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ASJC Scopus subject areas

  • Control and Systems Engineering
  • Biophysics

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