APPLICATION OF MONTE CARLO TECHNIQUE TO QUANTITATIVE AUGER ANALYSIS - APPROACH FOR QUANTITATIVE CORRECTION OF ELECTRON BACKSCATTERING EFFECT.

This work briefly reviews studies of the backscattering effect and then presents the authors most recent theoretical results that should lead to more accurate quantitative AES analysis. These theoretical results were obtained from Monte Carlo calculations based on the use of more precise theoretical expressions for both the elastic and inelastic scattering; i. e. , elastic scattering cross-sections calculated by the partial wave expansion method and Gryzinski's excitation function combined with Bethe's stopping power, respectively.