Application of pressure sensitive luminophores for micro- and nano-systems

yu Matsuda, Hideo Mori, Tomohide Niimi, Hiroyuki Uenishi, Madoka Hirako

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Experimental analyses of thermo-fluid phenomena of micro- and nano-flows with high Knudsen number need the measurement techniques based on interaction of atoms or molecules with photons. The pressure sensitive paint (PSP) technique has the capability to be applied to high Knudsen number flows, such as micro-flows and low density gas flows. In this study, to inspect the feasibility of PSP for measurement of pressure on a solid surface in high Knudsen number flows, fundamental properties of PSPs are examined especially in the range of pressure below 1 Torr. As an application of PSP to measurement in high Knudsen number conditions, the pressure distribution on a jet-impinging small solid surface is measured. However, application of the PSP technique to a micro-system is very difficult, because of large thickness of conventional PSPs. Therefore, we have adopted Langmuir-Blodgett (LB) method to fabricate a pressure sensitive molecular film (PSMF) applicable to pressure measurement around micro/nano devices. Finally, the dependence of luminescence intensity of PSP on the molecular number flux onto the solid surface is discussed, because molecular number flux is an important quantity to analyze the interaction between high Knudsen number flows and solid surfaces.

Original languageEnglish
Title of host publicationProceedings of the 2005 International Symposium on Micro-NanoMechatronics and Human Science, Eighth Symposium on Micro- and Nano-Mechatronics for Information-Based Society - The 21st Century COE Progr
Pages267-272
Number of pages6
Volume2005
DOIs
Publication statusPublished - 2005 Dec 1
Externally publishedYes
Event2005 International Symposium on Micro-NanoMechatronics and Human Science, Eighth Symposium on Micro- and Nano-Mechatronics for Information-Based Society - The 21st Century COE Program - Nagayo, Japan
Duration: 2005 Nov 72005 Nov 9

Other

Other2005 International Symposium on Micro-NanoMechatronics and Human Science, Eighth Symposium on Micro- and Nano-Mechatronics for Information-Based Society - The 21st Century COE Program
CountryJapan
CityNagayo
Period05/11/705/11/9

Fingerprint

Paint
Fluxes
Pressure measurement
Pressure distribution
Flow of gases
Luminescence
Photons
Atoms
Molecules
Fluids

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Matsuda, Y., Mori, H., Niimi, T., Uenishi, H., & Hirako, M. (2005). Application of pressure sensitive luminophores for micro- and nano-systems. In Proceedings of the 2005 International Symposium on Micro-NanoMechatronics and Human Science, Eighth Symposium on Micro- and Nano-Mechatronics for Information-Based Society - The 21st Century COE Progr (Vol. 2005, pp. 267-272). [1590002] https://doi.org/10.1109/MHS.2005.1590002

Application of pressure sensitive luminophores for micro- and nano-systems. / Matsuda, yu; Mori, Hideo; Niimi, Tomohide; Uenishi, Hiroyuki; Hirako, Madoka.

Proceedings of the 2005 International Symposium on Micro-NanoMechatronics and Human Science, Eighth Symposium on Micro- and Nano-Mechatronics for Information-Based Society - The 21st Century COE Progr. Vol. 2005 2005. p. 267-272 1590002.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Matsuda, Y, Mori, H, Niimi, T, Uenishi, H & Hirako, M 2005, Application of pressure sensitive luminophores for micro- and nano-systems. in Proceedings of the 2005 International Symposium on Micro-NanoMechatronics and Human Science, Eighth Symposium on Micro- and Nano-Mechatronics for Information-Based Society - The 21st Century COE Progr. vol. 2005, 1590002, pp. 267-272, 2005 International Symposium on Micro-NanoMechatronics and Human Science, Eighth Symposium on Micro- and Nano-Mechatronics for Information-Based Society - The 21st Century COE Program, Nagayo, Japan, 05/11/7. https://doi.org/10.1109/MHS.2005.1590002
Matsuda Y, Mori H, Niimi T, Uenishi H, Hirako M. Application of pressure sensitive luminophores for micro- and nano-systems. In Proceedings of the 2005 International Symposium on Micro-NanoMechatronics and Human Science, Eighth Symposium on Micro- and Nano-Mechatronics for Information-Based Society - The 21st Century COE Progr. Vol. 2005. 2005. p. 267-272. 1590002 https://doi.org/10.1109/MHS.2005.1590002
Matsuda, yu ; Mori, Hideo ; Niimi, Tomohide ; Uenishi, Hiroyuki ; Hirako, Madoka. / Application of pressure sensitive luminophores for micro- and nano-systems. Proceedings of the 2005 International Symposium on Micro-NanoMechatronics and Human Science, Eighth Symposium on Micro- and Nano-Mechatronics for Information-Based Society - The 21st Century COE Progr. Vol. 2005 2005. pp. 267-272
@inproceedings{4ed66e0db7484e9c89b2fe702f9e23fe,
title = "Application of pressure sensitive luminophores for micro- and nano-systems",
abstract = "Experimental analyses of thermo-fluid phenomena of micro- and nano-flows with high Knudsen number need the measurement techniques based on interaction of atoms or molecules with photons. The pressure sensitive paint (PSP) technique has the capability to be applied to high Knudsen number flows, such as micro-flows and low density gas flows. In this study, to inspect the feasibility of PSP for measurement of pressure on a solid surface in high Knudsen number flows, fundamental properties of PSPs are examined especially in the range of pressure below 1 Torr. As an application of PSP to measurement in high Knudsen number conditions, the pressure distribution on a jet-impinging small solid surface is measured. However, application of the PSP technique to a micro-system is very difficult, because of large thickness of conventional PSPs. Therefore, we have adopted Langmuir-Blodgett (LB) method to fabricate a pressure sensitive molecular film (PSMF) applicable to pressure measurement around micro/nano devices. Finally, the dependence of luminescence intensity of PSP on the molecular number flux onto the solid surface is discussed, because molecular number flux is an important quantity to analyze the interaction between high Knudsen number flows and solid surfaces.",
author = "yu Matsuda and Hideo Mori and Tomohide Niimi and Hiroyuki Uenishi and Madoka Hirako",
year = "2005",
month = "12",
day = "1",
doi = "10.1109/MHS.2005.1590002",
language = "English",
isbn = "0780394828",
volume = "2005",
pages = "267--272",
booktitle = "Proceedings of the 2005 International Symposium on Micro-NanoMechatronics and Human Science, Eighth Symposium on Micro- and Nano-Mechatronics for Information-Based Society - The 21st Century COE Progr",

}

TY - GEN

T1 - Application of pressure sensitive luminophores for micro- and nano-systems

AU - Matsuda, yu

AU - Mori, Hideo

AU - Niimi, Tomohide

AU - Uenishi, Hiroyuki

AU - Hirako, Madoka

PY - 2005/12/1

Y1 - 2005/12/1

N2 - Experimental analyses of thermo-fluid phenomena of micro- and nano-flows with high Knudsen number need the measurement techniques based on interaction of atoms or molecules with photons. The pressure sensitive paint (PSP) technique has the capability to be applied to high Knudsen number flows, such as micro-flows and low density gas flows. In this study, to inspect the feasibility of PSP for measurement of pressure on a solid surface in high Knudsen number flows, fundamental properties of PSPs are examined especially in the range of pressure below 1 Torr. As an application of PSP to measurement in high Knudsen number conditions, the pressure distribution on a jet-impinging small solid surface is measured. However, application of the PSP technique to a micro-system is very difficult, because of large thickness of conventional PSPs. Therefore, we have adopted Langmuir-Blodgett (LB) method to fabricate a pressure sensitive molecular film (PSMF) applicable to pressure measurement around micro/nano devices. Finally, the dependence of luminescence intensity of PSP on the molecular number flux onto the solid surface is discussed, because molecular number flux is an important quantity to analyze the interaction between high Knudsen number flows and solid surfaces.

AB - Experimental analyses of thermo-fluid phenomena of micro- and nano-flows with high Knudsen number need the measurement techniques based on interaction of atoms or molecules with photons. The pressure sensitive paint (PSP) technique has the capability to be applied to high Knudsen number flows, such as micro-flows and low density gas flows. In this study, to inspect the feasibility of PSP for measurement of pressure on a solid surface in high Knudsen number flows, fundamental properties of PSPs are examined especially in the range of pressure below 1 Torr. As an application of PSP to measurement in high Knudsen number conditions, the pressure distribution on a jet-impinging small solid surface is measured. However, application of the PSP technique to a micro-system is very difficult, because of large thickness of conventional PSPs. Therefore, we have adopted Langmuir-Blodgett (LB) method to fabricate a pressure sensitive molecular film (PSMF) applicable to pressure measurement around micro/nano devices. Finally, the dependence of luminescence intensity of PSP on the molecular number flux onto the solid surface is discussed, because molecular number flux is an important quantity to analyze the interaction between high Knudsen number flows and solid surfaces.

UR - http://www.scopus.com/inward/record.url?scp=33847053241&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=33847053241&partnerID=8YFLogxK

U2 - 10.1109/MHS.2005.1590002

DO - 10.1109/MHS.2005.1590002

M3 - Conference contribution

AN - SCOPUS:33847053241

SN - 0780394828

SN - 9780780394827

VL - 2005

SP - 267

EP - 272

BT - Proceedings of the 2005 International Symposium on Micro-NanoMechatronics and Human Science, Eighth Symposium on Micro- and Nano-Mechatronics for Information-Based Society - The 21st Century COE Progr

ER -