Application of stm nanometer-size oxidation process to planar-type mim diode

Kazuhiko Matsumoto, Shu Takahashi, Masami Ishii, Masakatsu Hoshi, Akira Kurokawa, Shingo Ichimura, Atsushi Ando

Research output: Contribution to journalArticlepeer-review

105 Citations (Scopus)

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Engineering & Materials Science

Physics & Astronomy