Ar Implantation-Induced Quantum Dot Intermixing Technique for 1550 nm-Band Highly Stacked QD Photonic Integrated Circuit

A. Matsumoto*, Y. Takei, K. Akahane, S. Matsui, T. Umezawa, N. Yamamoto, Y. Matsushima, K. Utaka

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We studied an Ar-implantation-induced quantum dot intermixing (QDI) technique and its physical mechanism, and demonstrate an almost equal performance of the QDI used 120 nm shifted laser diode compared to the performance without the technique.

Original languageEnglish
Title of host publicationCLEO
Subtitle of host publicationScience and Innovations, SI 2016
PublisherOptica Publishing Group (formerly OSA)
ISBN (Electronic)9781557528209
Publication statusPublished - 2016
EventCLEO: Science and Innovations, SI 2016 - San Jose, United States
Duration: 2016 Jun 52016 Jun 10

Publication series

NameOptics InfoBase Conference Papers

Conference

ConferenceCLEO: Science and Innovations, SI 2016
Country/TerritoryUnited States
CitySan Jose
Period16/6/516/6/10

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials

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