Atom probe study of erbium and oxygen co-implanted silicon

Yasuo Shimizu, Yuan Tu, Ayman Abdelghafar, Maasa Yano, Yudai Suzuki, Takashi Tanii, Takahiro Shinada, Enrico Prati, Michele Celebrano, Marco Finazzi, Lavinia Ghirardini, Koji Inoue, Yasuyoshi Nagai

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    2 Citations (Scopus)

    Abstract

    It has been reported that erbium (Er) is a source of optical emission at λ=1.54 pm due to 4I13/24I15/2 transition of Er3+. A method of oxygen (O) codoping with Er has attracted attention as a candidate for obtaining more efficient optical gain by forming Er:O complex. Although several simulations predict the equilibrium structure of Er:O complex, it is difficult to understand experimentally how related between these implanted ions followed by annealing for optical activation. In this workshop, we reported the preliminary results on three-dimensional distributions of Er and O co-implanted into Si investigated by atom probe tomography.

    Original languageEnglish
    Title of host publication2017 Silicon Nanoelectronics Workshop, SNW 2017
    PublisherInstitute of Electrical and Electronics Engineers Inc.
    Pages99-100
    Number of pages2
    Volume2017-January
    ISBN (Electronic)9784863486478
    DOIs
    Publication statusPublished - 2017 Dec 29
    Event22nd Silicon Nanoelectronics Workshop, SNW 2017 - Kyoto, Japan
    Duration: 2017 Jun 42017 Jun 5

    Other

    Other22nd Silicon Nanoelectronics Workshop, SNW 2017
    CountryJapan
    CityKyoto
    Period17/6/417/6/5

    Fingerprint

    Erbium
    Silicon
    Oxygen
    Atoms
    Optical gain
    Tomography
    Chemical activation
    Annealing
    Ions

    ASJC Scopus subject areas

    • Electrical and Electronic Engineering
    • Electronic, Optical and Magnetic Materials

    Cite this

    Shimizu, Y., Tu, Y., Abdelghafar, A., Yano, M., Suzuki, Y., Tanii, T., ... Nagai, Y. (2017). Atom probe study of erbium and oxygen co-implanted silicon. In 2017 Silicon Nanoelectronics Workshop, SNW 2017 (Vol. 2017-January, pp. 99-100). [8242316] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.23919/SNW.2017.8242316

    Atom probe study of erbium and oxygen co-implanted silicon. / Shimizu, Yasuo; Tu, Yuan; Abdelghafar, Ayman; Yano, Maasa; Suzuki, Yudai; Tanii, Takashi; Shinada, Takahiro; Prati, Enrico; Celebrano, Michele; Finazzi, Marco; Ghirardini, Lavinia; Inoue, Koji; Nagai, Yasuyoshi.

    2017 Silicon Nanoelectronics Workshop, SNW 2017. Vol. 2017-January Institute of Electrical and Electronics Engineers Inc., 2017. p. 99-100 8242316.

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Shimizu, Y, Tu, Y, Abdelghafar, A, Yano, M, Suzuki, Y, Tanii, T, Shinada, T, Prati, E, Celebrano, M, Finazzi, M, Ghirardini, L, Inoue, K & Nagai, Y 2017, Atom probe study of erbium and oxygen co-implanted silicon. in 2017 Silicon Nanoelectronics Workshop, SNW 2017. vol. 2017-January, 8242316, Institute of Electrical and Electronics Engineers Inc., pp. 99-100, 22nd Silicon Nanoelectronics Workshop, SNW 2017, Kyoto, Japan, 17/6/4. https://doi.org/10.23919/SNW.2017.8242316
    Shimizu Y, Tu Y, Abdelghafar A, Yano M, Suzuki Y, Tanii T et al. Atom probe study of erbium and oxygen co-implanted silicon. In 2017 Silicon Nanoelectronics Workshop, SNW 2017. Vol. 2017-January. Institute of Electrical and Electronics Engineers Inc. 2017. p. 99-100. 8242316 https://doi.org/10.23919/SNW.2017.8242316
    Shimizu, Yasuo ; Tu, Yuan ; Abdelghafar, Ayman ; Yano, Maasa ; Suzuki, Yudai ; Tanii, Takashi ; Shinada, Takahiro ; Prati, Enrico ; Celebrano, Michele ; Finazzi, Marco ; Ghirardini, Lavinia ; Inoue, Koji ; Nagai, Yasuyoshi. / Atom probe study of erbium and oxygen co-implanted silicon. 2017 Silicon Nanoelectronics Workshop, SNW 2017. Vol. 2017-January Institute of Electrical and Electronics Engineers Inc., 2017. pp. 99-100
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    AU - Tu, Yuan

    AU - Abdelghafar, Ayman

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    AU - Suzuki, Yudai

    AU - Tanii, Takashi

    AU - Shinada, Takahiro

    AU - Prati, Enrico

    AU - Celebrano, Michele

    AU - Finazzi, Marco

    AU - Ghirardini, Lavinia

    AU - Inoue, Koji

    AU - Nagai, Yasuyoshi

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