Atomically flat (0 0 1)GaAs surface prepared by two-step atomic-hydrogen treatment and its application to heteroepitaxy of GaN

Hajime Nagano, Zhixin Qin, Anwei Jia, Yoshinori Kato, Masakazu Kobayashi, Akihiko Yoshikawa, Kiyoshi Takahashi

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11 Citations (Scopus)


Substrate surface treatment techniques and growth conditions are the key of growing high-quality cubic GaN (c-GaN) epitaxial layers on (0 0 1) GaAs substrates. An atomically flat (0 0 1) GaAs substrate surface can be obtained by a two-step atomic hydrogen (atomic-H) irradiation technique. The typical surface of the substrate treated by the atomic-H consists of narrow terraces of one monolayer step height with acute-angle polygonal structures. The X-ray rocking curve FWHM of GaN (0 0 2) grown on the atomic-H treated substrate is less than 90 arcsec. It is shown that high-density monolayer steps and kinks at the surface terrace edge would be preferable for the uniform nucleation of the c-GaN buffer layer.

Original languageEnglish
Pages (from-to)265-269
Number of pages5
JournalJournal of Crystal Growth
Publication statusPublished - 1998 Jun 15
Externally publishedYes



  • (0 0 1) GaAs
  • Atomic hydrogen
  • Atomically flat
  • Cubic GaN
  • Kinks
  • Surface treatment

ASJC Scopus subject areas

  • Condensed Matter Physics

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