Attempts on pico-precision machining via combination of ELID-grinding and polishing

Hitoshi Ohmori, Yunji Kim, Yoshihiro Uehara, Hiroshi Kasuga, Teruko Ono-Kato, Weimin Lin, Syuhei Kurokawa, Shinjiro Umezu

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)304-309
Number of pages6
JournalSeimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
Volume85
Issue number4
DOIs
Publication statusPublished - 2019 Jan 1
Externally publishedYes

Keywords

  • Broad-band fabrication
  • CMP
  • ELID
  • MRF
  • Pico-precision machining
  • Ultraprecision grinding

ASJC Scopus subject areas

  • Mechanical Engineering

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