@article{50c9acdf8d87436abb6b70f3c16c4c65,
title = "Attempts on pico-precision machining via combination of ELID-grinding and polishing",
keywords = "Broad-band fabrication, CMP, ELID, MRF, Pico-precision machining, Ultraprecision grinding",
author = "Hitoshi Ohmori and Yunji Kim and Yoshihiro Uehara and Hiroshi Kasuga and Teruko Ono-Kato and Weimin Lin and Syuhei Kurokawa and Shinjiro Umezu",
year = "2019",
doi = "10.2493/jjspe.85.304",
language = "English",
volume = "85",
pages = "304--309",
journal = "Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering",
issn = "0912-0289",
publisher = "Japan Society for Precision Engineering",
number = "4",
}