Backscattering correction for quantitative Auger analysis III. A simple functional representation of electron backscattering factors

Shingo Ichimura, R. Shimizu, J. P. Langeron

Research output: Contribution to journalArticle

100 Citations (Scopus)

Abstract

Backscattering factors for quantitative Auger analysis which were obtained by Monte Carlo calculations were analytically represented by using simple functions. This should enable the backscattering correction procedure in quantitative Auger analysis to be of more practical use.

Original languageEnglish
Pages (from-to)49-54
Number of pages6
JournalSurface Science
Volume124
Issue number2-3
DOIs
Publication statusPublished - 1983 Jan 2
Externally publishedYes

Fingerprint

Backscattering
backscattering
Electrons
electrons

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

Cite this

Backscattering correction for quantitative Auger analysis III. A simple functional representation of electron backscattering factors. / Ichimura, Shingo; Shimizu, R.; Langeron, J. P.

In: Surface Science, Vol. 124, No. 2-3, 02.01.1983, p. 49-54.

Research output: Contribution to journalArticle

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