Backscattering correction for quantitative Auger analysis III. A simple functional representation of electron backscattering factors

S. Ichimura, R. Shimizu, J. P. Langeron

Research output: Contribution to journalArticle

100 Citations (Scopus)

Abstract

Backscattering factors for quantitative Auger analysis which were obtained by Monte Carlo calculations were analytically represented by using simple functions. This should enable the backscattering correction procedure in quantitative Auger analysis to be of more practical use.

Original languageEnglish
Pages (from-to)L49-L54
JournalSurface Science
Volume124
Issue number2-3
DOIs
Publication statusPublished - 1983 Jan 2

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

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