Basic research of vibration energy harvesting micro device using vinylidene fluoride / trifluoroethylene copolymer thin film

T. Takiguchi, Toshio Sasaki, T. Nakajima, S. Yamaura, Tetsushi Sekiguchi, Shuichi Shoji

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

Basic research of MEMS based micro devices for vibration energy harvesting using vinylidene fluoride / trifluoroethylene (VDF/TrFE) copolymer thin film was investigated. The VDF/TrFE copolymer thin film was formed by spin coating. Thickness of VDF/TrFE copolymer thin film was ranged from 375 nm to 2793 nm. Impedance of VDF/TrFE copolymer thin film was measured by LCR meter. Thin film in each thickness was fully poled by voltage based on C-V characteristics result. Generated power of the devices under applied vibration was observed by an oscilloscope. When the film thickness is 2793 nm, the generated power was about 0.815 μJ.

Original languageEnglish
Article number012030
JournalJournal of Physics: Conference Series
Volume557
Issue number1
DOIs
Publication statusPublished - 2014

Fingerprint

vinylidene
fluorides
copolymers
vibration
thin films
energy
oscilloscopes
microelectromechanical systems
coating
film thickness
impedance
electric potential

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Cite this

@article{7ee9c877897e4f7e9b08abbd6ac9d5e3,
title = "Basic research of vibration energy harvesting micro device using vinylidene fluoride / trifluoroethylene copolymer thin film",
abstract = "Basic research of MEMS based micro devices for vibration energy harvesting using vinylidene fluoride / trifluoroethylene (VDF/TrFE) copolymer thin film was investigated. The VDF/TrFE copolymer thin film was formed by spin coating. Thickness of VDF/TrFE copolymer thin film was ranged from 375 nm to 2793 nm. Impedance of VDF/TrFE copolymer thin film was measured by LCR meter. Thin film in each thickness was fully poled by voltage based on C-V characteristics result. Generated power of the devices under applied vibration was observed by an oscilloscope. When the film thickness is 2793 nm, the generated power was about 0.815 μJ.",
author = "T. Takiguchi and Toshio Sasaki and T. Nakajima and S. Yamaura and Tetsushi Sekiguchi and Shuichi Shoji",
year = "2014",
doi = "10.1088/1742-6596/557/1/012030",
language = "English",
volume = "557",
journal = "Journal of Physics: Conference Series",
issn = "1742-6588",
publisher = "IOP Publishing Ltd.",
number = "1",

}

TY - JOUR

T1 - Basic research of vibration energy harvesting micro device using vinylidene fluoride / trifluoroethylene copolymer thin film

AU - Takiguchi, T.

AU - Sasaki, Toshio

AU - Nakajima, T.

AU - Yamaura, S.

AU - Sekiguchi, Tetsushi

AU - Shoji, Shuichi

PY - 2014

Y1 - 2014

N2 - Basic research of MEMS based micro devices for vibration energy harvesting using vinylidene fluoride / trifluoroethylene (VDF/TrFE) copolymer thin film was investigated. The VDF/TrFE copolymer thin film was formed by spin coating. Thickness of VDF/TrFE copolymer thin film was ranged from 375 nm to 2793 nm. Impedance of VDF/TrFE copolymer thin film was measured by LCR meter. Thin film in each thickness was fully poled by voltage based on C-V characteristics result. Generated power of the devices under applied vibration was observed by an oscilloscope. When the film thickness is 2793 nm, the generated power was about 0.815 μJ.

AB - Basic research of MEMS based micro devices for vibration energy harvesting using vinylidene fluoride / trifluoroethylene (VDF/TrFE) copolymer thin film was investigated. The VDF/TrFE copolymer thin film was formed by spin coating. Thickness of VDF/TrFE copolymer thin film was ranged from 375 nm to 2793 nm. Impedance of VDF/TrFE copolymer thin film was measured by LCR meter. Thin film in each thickness was fully poled by voltage based on C-V characteristics result. Generated power of the devices under applied vibration was observed by an oscilloscope. When the film thickness is 2793 nm, the generated power was about 0.815 μJ.

UR - http://www.scopus.com/inward/record.url?scp=84915818751&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84915818751&partnerID=8YFLogxK

U2 - 10.1088/1742-6596/557/1/012030

DO - 10.1088/1742-6596/557/1/012030

M3 - Article

AN - SCOPUS:84915818751

VL - 557

JO - Journal of Physics: Conference Series

JF - Journal of Physics: Conference Series

SN - 1742-6588

IS - 1

M1 - 012030

ER -