Basic research of vibration energy harvesting micro device using vinylidene fluoride / trifluoroethylene copolymer thin film

T. Takiguchi, T. Sasaki, T. Nakajima, S. Yamaura, T. Sekiguchi, S. Shoji

Research output: Contribution to journalConference articlepeer-review

3 Citations (Scopus)

Abstract

Basic research of MEMS based micro devices for vibration energy harvesting using vinylidene fluoride / trifluoroethylene (VDF/TrFE) copolymer thin film was investigated. The VDF/TrFE copolymer thin film was formed by spin coating. Thickness of VDF/TrFE copolymer thin film was ranged from 375 nm to 2793 nm. Impedance of VDF/TrFE copolymer thin film was measured by LCR meter. Thin film in each thickness was fully poled by voltage based on C-V characteristics result. Generated power of the devices under applied vibration was observed by an oscilloscope. When the film thickness is 2793 nm, the generated power was about 0.815 μJ.

Original languageEnglish
Article number012030
JournalJournal of Physics: Conference Series
Volume557
Issue number1
DOIs
Publication statusPublished - 2014 Jan 1
Event14th International Conference on Micro- and Nano-Technology for Power Generation and Energy Conversion Applications, PowerMEMS 2014 - Awaji Island, Hyogo, Japan
Duration: 2014 Nov 182014 Nov 21

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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