Batch fabrication of carbon nanotubes at AFM probe tips and AFM imaging

Kazuhiko Takagahara; Yusuke Takei; Eiji Iwase; Kiyoshi Matsumoto; Isao Shimoyama

doi:10.1109/MEMSYS.2008.4443756

Batch fabrication of carbon nanotubes at AFM probe tips and AFM imaging

Kazuhiko Takagahara^*, Yusuke Takei, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

2 Citations (Scopus)

Abstract

We synthesized carbon nanotubes (CNTs) at the tips of commercial atomic force microscope (AFM) probes by chemical vapor deposition (CVD) process with applying an electric field. Applying the electric field during the CVD process increased the yield of AFM probes with CNTs at the tips (CNT-AFM probes). We formed a catalyst layer on the surface of AFM probes, and carried out the CVD process to synthesize CNTs. After the CVD process, we observed the tips of the AFM probes with a scanning electron microscope (SEM). The yield of CNT-AFM probes was about 52 %. The CNTs were determined by resonance Raman spectroscopy using a 488 nm argon ion laser. Observed Raman peaks were peculiar to single-walled carbon nanotubes (SWNTs). Then we obtained AFM images of a sample grating with the CNT-AFM probes. The CNT-AFM probes had higher horizontal resolution than standard commercial AFM probes.

Original language	English
Title of host publication	MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems
Pages	713-716
Number of pages	4
DOIs	https://doi.org/10.1109/MEMSYS.2008.4443756
Publication status	Published - 2008 Aug 29
Externally published	Yes
Event	21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson - Tucson, AZ, United States Duration: 2008 Jan 13 → 2008 Jan 17

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Conference

Conference	21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson
Country/Territory	United States
City	Tucson, AZ
Period	08/1/13 → 08/1/17

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

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10.1109/MEMSYS.2008.4443756

Cite this

Takagahara, K., Takei, Y., Iwase, E., Matsumoto, K., & Shimoyama, I. (2008). Batch fabrication of carbon nanotubes at AFM probe tips and AFM imaging. In MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems (pp. 713-716). [4443756] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2008.4443756

Batch fabrication of carbon nanotubes at AFM probe tips and AFM imaging. / Takagahara, Kazuhiko; Takei, Yusuke; Iwase, Eiji et al.

MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems. 2008. p. 713-716 4443756 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Takagahara, K, Takei, Y, Iwase, E, Matsumoto, K & Shimoyama, I 2008, Batch fabrication of carbon nanotubes at AFM probe tips and AFM imaging. in MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems., 4443756, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 713-716, 21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson, Tucson, AZ, United States, 08/1/13. https://doi.org/10.1109/MEMSYS.2008.4443756

Takagahara K, Takei Y, Iwase E, Matsumoto K, Shimoyama I. Batch fabrication of carbon nanotubes at AFM probe tips and AFM imaging. In MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems. 2008. p. 713-716. 4443756. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2008.4443756

@inproceedings{1d472f8b6b2f46d688d6edd9d9b93a06,

title = "Batch fabrication of carbon nanotubes at AFM probe tips and AFM imaging",

abstract = "We synthesized carbon nanotubes (CNTs) at the tips of commercial atomic force microscope (AFM) probes by chemical vapor deposition (CVD) process with applying an electric field. Applying the electric field during the CVD process increased the yield of AFM probes with CNTs at the tips (CNT-AFM probes). We formed a catalyst layer on the surface of AFM probes, and carried out the CVD process to synthesize CNTs. After the CVD process, we observed the tips of the AFM probes with a scanning electron microscope (SEM). The yield of CNT-AFM probes was about 52 %. The CNTs were determined by resonance Raman spectroscopy using a 488 nm argon ion laser. Observed Raman peaks were peculiar to single-walled carbon nanotubes (SWNTs). Then we obtained AFM images of a sample grating with the CNT-AFM probes. The CNT-AFM probes had higher horizontal resolution than standard commercial AFM probes.",

author = "Kazuhiko Takagahara and Yusuke Takei and Eiji Iwase and Kiyoshi Matsumoto and Isao Shimoyama",

year = "2008",

month = aug,

day = "29",

doi = "10.1109/MEMSYS.2008.4443756",

language = "English",

isbn = "9781424417933",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

pages = "713--716",

booktitle = "MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems",

note = "21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson ; Conference date: 13-01-2008 Through 17-01-2008",

}

TY - GEN

T1 - Batch fabrication of carbon nanotubes at AFM probe tips and AFM imaging

AU - Takagahara, Kazuhiko

AU - Takei, Yusuke

AU - Iwase, Eiji

AU - Matsumoto, Kiyoshi

AU - Shimoyama, Isao

PY - 2008/8/29

Y1 - 2008/8/29

N2 - We synthesized carbon nanotubes (CNTs) at the tips of commercial atomic force microscope (AFM) probes by chemical vapor deposition (CVD) process with applying an electric field. Applying the electric field during the CVD process increased the yield of AFM probes with CNTs at the tips (CNT-AFM probes). We formed a catalyst layer on the surface of AFM probes, and carried out the CVD process to synthesize CNTs. After the CVD process, we observed the tips of the AFM probes with a scanning electron microscope (SEM). The yield of CNT-AFM probes was about 52 %. The CNTs were determined by resonance Raman spectroscopy using a 488 nm argon ion laser. Observed Raman peaks were peculiar to single-walled carbon nanotubes (SWNTs). Then we obtained AFM images of a sample grating with the CNT-AFM probes. The CNT-AFM probes had higher horizontal resolution than standard commercial AFM probes.

AB - We synthesized carbon nanotubes (CNTs) at the tips of commercial atomic force microscope (AFM) probes by chemical vapor deposition (CVD) process with applying an electric field. Applying the electric field during the CVD process increased the yield of AFM probes with CNTs at the tips (CNT-AFM probes). We formed a catalyst layer on the surface of AFM probes, and carried out the CVD process to synthesize CNTs. After the CVD process, we observed the tips of the AFM probes with a scanning electron microscope (SEM). The yield of CNT-AFM probes was about 52 %. The CNTs were determined by resonance Raman spectroscopy using a 488 nm argon ion laser. Observed Raman peaks were peculiar to single-walled carbon nanotubes (SWNTs). Then we obtained AFM images of a sample grating with the CNT-AFM probes. The CNT-AFM probes had higher horizontal resolution than standard commercial AFM probes.

UR - http://www.scopus.com/inward/record.url?scp=50149107403&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=50149107403&partnerID=8YFLogxK

U2 - 10.1109/MEMSYS.2008.4443756

DO - 10.1109/MEMSYS.2008.4443756

M3 - Conference contribution

AN - SCOPUS:50149107403

SN - 9781424417933

T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

SP - 713

EP - 716

BT - MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems

T2 - 21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson

Y2 - 13 January 2008 through 17 January 2008

ER -

Batch fabrication of carbon nanotubes at AFM probe tips and AFM imaging

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