Batch fabrication of carbon nanotubes at AFM probe tips and AFM imaging

Kazuhiko Takagahara, Yusuke Takei, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

We synthesized carbon nanotubes (CNTs) at the tips of commercial atomic force microscope (AFM) probes by chemical vapor deposition (CVD) process with applying an electric field. Applying the electric field during the CVD process increased the yield of AFM probes with CNTs at the tips (CNT-AFM probes). We formed a catalyst layer on the surface of AFM probes, and carried out the CVD process to synthesize CNTs. After the CVD process, we observed the tips of the AFM probes with a scanning electron microscope (SEM). The yield of CNT-AFM probes was about 52 %. The CNTs were determined by resonance Raman spectroscopy using a 488 nm argon ion laser. Observed Raman peaks were peculiar to single-walled carbon nanotubes (SWNTs). Then we obtained AFM images of a sample grating with the CNT-AFM probes. The CNT-AFM probes had higher horizontal resolution than standard commercial AFM probes.

Original languageEnglish
Title of host publicationMEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems
Pages713-716
Number of pages4
DOIs
Publication statusPublished - 2008 Aug 29
Externally publishedYes
Event21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson - Tucson, AZ, United States
Duration: 2008 Jan 132008 Jan 17

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Conference

Conference21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson
CountryUnited States
CityTucson, AZ
Period08/1/1308/1/17

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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