Behavior of ion-implanted As atoms in Si during molybdenum disilicide formation

Iwao Ohdomari, Toyohiro Chikyow, Hiroshi Kawarada, Kazuo Konuma, Masakazu Kakumu, Kazuhiko Hashimoto, Itsuro Kimura, Kenji Yoneda

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Abstract

The behavior of ion implanted As atoms during MoSi2 formation has been investigated by I-V measurement and neutron activation analysis. I-V characteristics of the MoSi2/Si interface was rectifying indicating that the impurity concentration in Si is very low. Arsenic atoms implanted in the Si substrate were found to redistribute toward the MoSi2/Si interface, but not into the underlying Si. The reason for no enhanced diffusion of As during MoSi2 formation has been discussed in terms of point defects which are not likely to be generated for the silicides in which Si is the dominant diffusing species.

Original languageEnglish
Pages (from-to)3073-3076
Number of pages4
JournalJournal of Applied Physics
Volume59
Issue number9
DOIs
Publication statusPublished - 1986 Dec 1

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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    Ohdomari, I., Chikyow, T., Kawarada, H., Konuma, K., Kakumu, M., Hashimoto, K., Kimura, I., & Yoneda, K. (1986). Behavior of ion-implanted As atoms in Si during molybdenum disilicide formation. Journal of Applied Physics, 59(9), 3073-3076. https://doi.org/10.1063/1.336930