Behavior of ion-implanted As atoms in Si during molybdenum disilicide formation

Iwao Ohdomari, Toyohiro Chikyow, Hiroshi Kawarada, Kazuo Konuma, Masakazu Kakumu, Kazuhiko Hashimoto, Itsuro Kimura, Kenji Yoneda

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)

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Physics & Astronomy