Broadband frequency viscositymeasurement using low TCF shear mode resonators consisting of C-axis tilted scaln thin film on thick at-cut quartz plate

Y. Yamakawa, K. Sano, R. Karasawa, Takahiko Yanagitani

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Abstract

    In order to study relaxation characteristics of acoustic velocity and viscoelasticity of the liquid, a wide frequency sweep in the range of MHz to GHz is desired. Thickness shear acoustic mode (TSM) viscosity sensors such as QCM or FBAR can only operate at the MHz range or the GHz range, respectively. In this study, therefore, we report a new type HBAR (High-overtone Bulk Acoustic Resonator) sensor which makes it possible to operate in a wide frequency range. The HBAR consists of the c-axis tilted ScAlN film grown on a zero TCF AT-cut quartz crystal plate. Frequency shifts were measured for various concentration of glycerine solutions. As a result, the tendency of resonant frequency decreasing caused by liquid viscosity increasing is observed in both theoretical and experimental data.

    Original languageEnglish
    Title of host publicationTRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
    PublisherInstitute of Electrical and Electronics Engineers Inc.
    Pages2135-2138
    Number of pages4
    ISBN (Electronic)9781538627310
    DOIs
    Publication statusPublished - 2017 Jul 26
    Event19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017 - Kaohsiung, Taiwan, Province of China
    Duration: 2017 Jun 182017 Jun 22

    Other

    Other19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017
    CountryTaiwan, Province of China
    CityKaohsiung
    Period17/6/1817/6/22

    Keywords

    • AT-cut quartz crystal
    • Glycerine
    • HBAR
    • ScAlN film
    • Viscosity sensor

    ASJC Scopus subject areas

    • Chemical Health and Safety
    • Instrumentation
    • Electrical and Electronic Engineering

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