TY - GEN
T1 - Broadband frequency viscositymeasurement using low TCF shear mode resonators consisting of C-axis tilted scaln thin film on thick at-cut quartz plate
AU - Yamakawa, Y.
AU - Sano, K.
AU - Karasawa, R.
AU - Yanagitani, T.
N1 - Funding Information:
This work was partially supported by the Japan Science and Technology Agency, PRESTO (JST, PRESTO, No. JPMJPR16R8).
Publisher Copyright:
© 2017 IEEE.
PY - 2017/7/26
Y1 - 2017/7/26
N2 - In order to study relaxation characteristics of acoustic velocity and viscoelasticity of the liquid, a wide frequency sweep in the range of MHz to GHz is desired. Thickness shear acoustic mode (TSM) viscosity sensors such as QCM or FBAR can only operate at the MHz range or the GHz range, respectively. In this study, therefore, we report a new type HBAR (High-overtone Bulk Acoustic Resonator) sensor which makes it possible to operate in a wide frequency range. The HBAR consists of the c-axis tilted ScAlN film grown on a zero TCF AT-cut quartz crystal plate. Frequency shifts were measured for various concentration of glycerine solutions. As a result, the tendency of resonant frequency decreasing caused by liquid viscosity increasing is observed in both theoretical and experimental data.
AB - In order to study relaxation characteristics of acoustic velocity and viscoelasticity of the liquid, a wide frequency sweep in the range of MHz to GHz is desired. Thickness shear acoustic mode (TSM) viscosity sensors such as QCM or FBAR can only operate at the MHz range or the GHz range, respectively. In this study, therefore, we report a new type HBAR (High-overtone Bulk Acoustic Resonator) sensor which makes it possible to operate in a wide frequency range. The HBAR consists of the c-axis tilted ScAlN film grown on a zero TCF AT-cut quartz crystal plate. Frequency shifts were measured for various concentration of glycerine solutions. As a result, the tendency of resonant frequency decreasing caused by liquid viscosity increasing is observed in both theoretical and experimental data.
KW - AT-cut quartz crystal
KW - Glycerine
KW - HBAR
KW - ScAlN film
KW - Viscosity sensor
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U2 - 10.1109/TRANSDUCERS.2017.7994497
DO - 10.1109/TRANSDUCERS.2017.7994497
M3 - Conference contribution
AN - SCOPUS:85029388761
T3 - TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
SP - 2135
EP - 2138
BT - TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017
Y2 - 18 June 2017 through 22 June 2017
ER -