Bulk-layout-compatible 0.18 μm SOI-CMOS technology using body-fixed partial trench isolation (PTI)

Y. Hirano, S. Maeda, T. Matsumoto, K. Nii, T. Iwamatsu, Y. Yamaguchi, T. Ipposhi, H. Kawashima, S. Maegawa, Masahide Inuishi, T. Nishimura

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Transistor performance improvement has been strongly required for work toward highly integrated intelligent system LSIs. To meet this demand, silicon on insulator (SOI) has become of major interest for next generation devices, because it can offer durable device scaling as compared with bulk devices (Schepis et al. 1997). The critical issues for SOI are floating-body effects such as deterioration in drain current (Matsumoto et al. 1999), dynamic threshold voltage instability (Lu et al. 1997), and increased soft error rate (Wada et al. 1998). These have restricted the application of floating SOI, especially to analog circuits. Some circuit modifications and body contact insertions are necessary. A full body-fixing structure is another approach and some techniques have been proposed (Koh et al. 1997; Iwamatsu et al. 1995). However, when using these techniques, there have been some shortcomings in terms of scalability and layout compatibility. In this report, we propose a partial trench isolation (PTI) technique in which the body potential is fixed through the region under the trench oxide. With the PTI technology, we can eliminate floating-body effects while maintaining SOI-inherent merits and can realize scalable deep sub-quarter micron LSIs using accumulated bulk-design properties without layout modification. Moreover, the feasibility for ULSIs is demonstrated by a fully functional 4 Mbit SRAM.

Original languageEnglish
Title of host publication1999 IEEE International SOI Conference, SOI 1999 - Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages131-132
Number of pages2
ISBN (Print)0780354567, 9780780354562
DOIs
Publication statusPublished - 1999 Jan 1
Externally publishedYes
Event25th Annual IEEE International Silicon-on-Insulator Conference, SOI 19999 - Rohnert Park, United States
Duration: 1999 Oct 41999 Oct 7

Other

Other25th Annual IEEE International Silicon-on-Insulator Conference, SOI 19999
CountryUnited States
CityRohnert Park
Period99/10/499/10/7

Fingerprint

Silicon
Drain current
Static random access storage
Analog circuits
Intelligent systems
Threshold voltage
Oxides
Deterioration
Scalability
Transistors
Networks (circuits)

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

Cite this

Hirano, Y., Maeda, S., Matsumoto, T., Nii, K., Iwamatsu, T., Yamaguchi, Y., ... Nishimura, T. (1999). Bulk-layout-compatible 0.18 μm SOI-CMOS technology using body-fixed partial trench isolation (PTI). In 1999 IEEE International SOI Conference, SOI 1999 - Proceedings (pp. 131-132). [819887] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/SOI.1999.819887

Bulk-layout-compatible 0.18 μm SOI-CMOS technology using body-fixed partial trench isolation (PTI). / Hirano, Y.; Maeda, S.; Matsumoto, T.; Nii, K.; Iwamatsu, T.; Yamaguchi, Y.; Ipposhi, T.; Kawashima, H.; Maegawa, S.; Inuishi, Masahide; Nishimura, T.

1999 IEEE International SOI Conference, SOI 1999 - Proceedings. Institute of Electrical and Electronics Engineers Inc., 1999. p. 131-132 819887.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Hirano, Y, Maeda, S, Matsumoto, T, Nii, K, Iwamatsu, T, Yamaguchi, Y, Ipposhi, T, Kawashima, H, Maegawa, S, Inuishi, M & Nishimura, T 1999, Bulk-layout-compatible 0.18 μm SOI-CMOS technology using body-fixed partial trench isolation (PTI). in 1999 IEEE International SOI Conference, SOI 1999 - Proceedings., 819887, Institute of Electrical and Electronics Engineers Inc., pp. 131-132, 25th Annual IEEE International Silicon-on-Insulator Conference, SOI 19999, Rohnert Park, United States, 99/10/4. https://doi.org/10.1109/SOI.1999.819887
Hirano Y, Maeda S, Matsumoto T, Nii K, Iwamatsu T, Yamaguchi Y et al. Bulk-layout-compatible 0.18 μm SOI-CMOS technology using body-fixed partial trench isolation (PTI). In 1999 IEEE International SOI Conference, SOI 1999 - Proceedings. Institute of Electrical and Electronics Engineers Inc. 1999. p. 131-132. 819887 https://doi.org/10.1109/SOI.1999.819887
Hirano, Y. ; Maeda, S. ; Matsumoto, T. ; Nii, K. ; Iwamatsu, T. ; Yamaguchi, Y. ; Ipposhi, T. ; Kawashima, H. ; Maegawa, S. ; Inuishi, Masahide ; Nishimura, T. / Bulk-layout-compatible 0.18 μm SOI-CMOS technology using body-fixed partial trench isolation (PTI). 1999 IEEE International SOI Conference, SOI 1999 - Proceedings. Institute of Electrical and Electronics Engineers Inc., 1999. pp. 131-132
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