C-axis parallel oriented ZnO film SH-SAW sensor for electrical conductivity measurement in liquid

Yuta Nakahigashi, Takahiko Yanagitani, Mami Matsukawa, Yoshiaki Watanabe

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

A shear horizontal type surface acoustic wave (SH-SAW) device can be a sensor operating in liquid, because SH-SAW propagates at liquid/solid interface without energy leakage to liquid. This device can detect changes in conductivity and viscosity of liquid. c-axis parallel oriented ZnO film can be one of the best candidates for the SH-SAW liquid sensor on various substrates. Theoretical investigation of K 2 value in IDT / ZnO (0°, 90°, ψ) film / silica glass substrate structure showed that maximum value of K 2 = 3.4 % was found at ψ = 55° with H / λ = 0.21. In this study, we fabricated these structures and evaluated K 2 values. Finally, the electrical conductivity of liquid was detected as the velocity change.

Original languageEnglish
Title of host publicationIEEE International Ultrasonics Symposium, IUS
Pages810-813
Number of pages4
DOIs
Publication statusPublished - 2011
Externally publishedYes
Event2011 IEEE International Ultrasonics Symposium, IUS 2011 - Orlando, FL, United States
Duration: 2011 Oct 182011 Oct 21

Other

Other2011 IEEE International Ultrasonics Symposium, IUS 2011
CountryUnited States
CityOrlando, FL
Period11/10/1811/10/21

Fingerprint

shear
electrical resistivity
acoustics
sensors
liquids
surface acoustic wave devices
silica glass
liquid-solid interfaces
leakage
viscosity
conductivity
energy

Keywords

  • c-axis parallel oriented ZnO film
  • sensor
  • SH-SAW

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

Cite this

Nakahigashi, Y., Yanagitani, T., Matsukawa, M., & Watanabe, Y. (2011). C-axis parallel oriented ZnO film SH-SAW sensor for electrical conductivity measurement in liquid. In IEEE International Ultrasonics Symposium, IUS (pp. 810-813). [6293741] https://doi.org/10.1109/ULTSYM.2011.0198

C-axis parallel oriented ZnO film SH-SAW sensor for electrical conductivity measurement in liquid. / Nakahigashi, Yuta; Yanagitani, Takahiko; Matsukawa, Mami; Watanabe, Yoshiaki.

IEEE International Ultrasonics Symposium, IUS. 2011. p. 810-813 6293741.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Nakahigashi, Y, Yanagitani, T, Matsukawa, M & Watanabe, Y 2011, C-axis parallel oriented ZnO film SH-SAW sensor for electrical conductivity measurement in liquid. in IEEE International Ultrasonics Symposium, IUS., 6293741, pp. 810-813, 2011 IEEE International Ultrasonics Symposium, IUS 2011, Orlando, FL, United States, 11/10/18. https://doi.org/10.1109/ULTSYM.2011.0198
Nakahigashi Y, Yanagitani T, Matsukawa M, Watanabe Y. C-axis parallel oriented ZnO film SH-SAW sensor for electrical conductivity measurement in liquid. In IEEE International Ultrasonics Symposium, IUS. 2011. p. 810-813. 6293741 https://doi.org/10.1109/ULTSYM.2011.0198
Nakahigashi, Yuta ; Yanagitani, Takahiko ; Matsukawa, Mami ; Watanabe, Yoshiaki. / C-axis parallel oriented ZnO film SH-SAW sensor for electrical conductivity measurement in liquid. IEEE International Ultrasonics Symposium, IUS. 2011. pp. 810-813
@inproceedings{cb4fe53e5bf0446396d0a05c3876a4f7,
title = "C-axis parallel oriented ZnO film SH-SAW sensor for electrical conductivity measurement in liquid",
abstract = "A shear horizontal type surface acoustic wave (SH-SAW) device can be a sensor operating in liquid, because SH-SAW propagates at liquid/solid interface without energy leakage to liquid. This device can detect changes in conductivity and viscosity of liquid. c-axis parallel oriented ZnO film can be one of the best candidates for the SH-SAW liquid sensor on various substrates. Theoretical investigation of K 2 value in IDT / ZnO (0°, 90°, ψ) film / silica glass substrate structure showed that maximum value of K 2 = 3.4 {\%} was found at ψ = 55° with H / λ = 0.21. In this study, we fabricated these structures and evaluated K 2 values. Finally, the electrical conductivity of liquid was detected as the velocity change.",
keywords = "c-axis parallel oriented ZnO film, sensor, SH-SAW",
author = "Yuta Nakahigashi and Takahiko Yanagitani and Mami Matsukawa and Yoshiaki Watanabe",
year = "2011",
doi = "10.1109/ULTSYM.2011.0198",
language = "English",
isbn = "9781457712531",
pages = "810--813",
booktitle = "IEEE International Ultrasonics Symposium, IUS",

}

TY - GEN

T1 - C-axis parallel oriented ZnO film SH-SAW sensor for electrical conductivity measurement in liquid

AU - Nakahigashi, Yuta

AU - Yanagitani, Takahiko

AU - Matsukawa, Mami

AU - Watanabe, Yoshiaki

PY - 2011

Y1 - 2011

N2 - A shear horizontal type surface acoustic wave (SH-SAW) device can be a sensor operating in liquid, because SH-SAW propagates at liquid/solid interface without energy leakage to liquid. This device can detect changes in conductivity and viscosity of liquid. c-axis parallel oriented ZnO film can be one of the best candidates for the SH-SAW liquid sensor on various substrates. Theoretical investigation of K 2 value in IDT / ZnO (0°, 90°, ψ) film / silica glass substrate structure showed that maximum value of K 2 = 3.4 % was found at ψ = 55° with H / λ = 0.21. In this study, we fabricated these structures and evaluated K 2 values. Finally, the electrical conductivity of liquid was detected as the velocity change.

AB - A shear horizontal type surface acoustic wave (SH-SAW) device can be a sensor operating in liquid, because SH-SAW propagates at liquid/solid interface without energy leakage to liquid. This device can detect changes in conductivity and viscosity of liquid. c-axis parallel oriented ZnO film can be one of the best candidates for the SH-SAW liquid sensor on various substrates. Theoretical investigation of K 2 value in IDT / ZnO (0°, 90°, ψ) film / silica glass substrate structure showed that maximum value of K 2 = 3.4 % was found at ψ = 55° with H / λ = 0.21. In this study, we fabricated these structures and evaluated K 2 values. Finally, the electrical conductivity of liquid was detected as the velocity change.

KW - c-axis parallel oriented ZnO film

KW - sensor

KW - SH-SAW

UR - http://www.scopus.com/inward/record.url?scp=84869043203&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84869043203&partnerID=8YFLogxK

U2 - 10.1109/ULTSYM.2011.0198

DO - 10.1109/ULTSYM.2011.0198

M3 - Conference contribution

SN - 9781457712531

SP - 810

EP - 813

BT - IEEE International Ultrasonics Symposium, IUS

ER -