C-axis parallel oriented ZnO film SH-SAW sensor for electrical conductivity measurement in liquid

Yuta Nakahigashi, Takahiko Yanagitani, Mami Matsukawa, Yoshiaki Watanabe

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

A shear horizontal type surface acoustic wave (SH-SAW) device can be a sensor operating in liquid, because SH-SAW propagates at liquid/solid interface without energy leakage to liquid. This device can detect changes in conductivity and viscosity of liquid. c-axis parallel oriented ZnO film can be one of the best candidates for the SH-SAW liquid sensor on various substrates. Theoretical investigation of K 2 value in IDT / ZnO (0°, 90°, ψ) film / silica glass substrate structure showed that maximum value of K 2 = 3.4 % was found at ψ = 55° with H / λ = 0.21. In this study, we fabricated these structures and evaluated K 2 values. Finally, the electrical conductivity of liquid was detected as the velocity change.

Original languageEnglish
Title of host publicationIEEE International Ultrasonics Symposium, IUS
Pages810-813
Number of pages4
DOIs
Publication statusPublished - 2011
Externally publishedYes
Event2011 IEEE International Ultrasonics Symposium, IUS 2011 - Orlando, FL, United States
Duration: 2011 Oct 182011 Oct 21

Other

Other2011 IEEE International Ultrasonics Symposium, IUS 2011
CountryUnited States
CityOrlando, FL
Period11/10/1811/10/21

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Keywords

  • c-axis parallel oriented ZnO film
  • sensor
  • SH-SAW

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

Cite this

Nakahigashi, Y., Yanagitani, T., Matsukawa, M., & Watanabe, Y. (2011). C-axis parallel oriented ZnO film SH-SAW sensor for electrical conductivity measurement in liquid. In IEEE International Ultrasonics Symposium, IUS (pp. 810-813). [6293741] https://doi.org/10.1109/ULTSYM.2011.0198