C-Axis Tilted ScAIN Film Shear Mode Resonators for Biosensing

Hana Yazaki, Takumi Soutome, Rei Karasawa, Shinji Takayanagi, Kenji Yoshida, Takahiko Yanagitani

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Miniature and highly sensitive biosensors are attractive. Quasi-shear mode c-axis tilted ScAIN film resonator is suitable for sensing biomolecules because they can operate in requid. Higher k'152 value of ScAIN films makes it possible to improve signal to noise ratio. In this study, the streptavidin-biotin interactions were monitored by using the c-axis tilted ScAlN film quasi-shear mode resonators.

Original languageEnglish
Title of host publication2018 IEEE International Ultrasonics Symposium, IUS 2018
PublisherIEEE Computer Society
ISBN (Electronic)9781538634257
DOIs
Publication statusPublished - 2018 Dec 17
Event2018 IEEE International Ultrasonics Symposium, IUS 2018 - Kobe, Japan
Duration: 2018 Oct 222018 Oct 25

Publication series

NameIEEE International Ultrasonics Symposium, IUS
Volume2018-October
ISSN (Print)1948-5719
ISSN (Electronic)1948-5727

Other

Other2018 IEEE International Ultrasonics Symposium, IUS 2018
CountryJapan
CityKobe
Period18/10/2218/10/25

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Keywords

  • QCM
  • ScA1N
  • TSM
  • biosensor

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

Cite this

Yazaki, H., Soutome, T., Karasawa, R., Takayanagi, S., Yoshida, K., & Yanagitani, T. (2018). C-Axis Tilted ScAIN Film Shear Mode Resonators for Biosensing. In 2018 IEEE International Ultrasonics Symposium, IUS 2018 [8580191] (IEEE International Ultrasonics Symposium, IUS; Vol. 2018-October). IEEE Computer Society. https://doi.org/10.1109/ULTSYM.2018.8580191