C-Axis Tilted ScAIN Film Shear Mode Resonators for Biosensing

Hana Yazaki; Takumi Soutome; Rei Karasawa; Shinji Takayanagi; Kenji Yoshida; Takahiko Yanagitani

doi:10.1109/ULTSYM.2018.8580191

C-Axis Tilted ScAIN Film Shear Mode Resonators for Biosensing

Hana Yazaki, Takumi Soutome, Rei Karasawa, Shinji Takayanagi, Kenji Yoshida, Takahiko Yanagitani

School of Advanced Science and Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Miniature and highly sensitive biosensors are attractive. Quasi-shear mode c-axis tilted ScAIN film resonator is suitable for sensing biomolecules because they can operate in requid. Higher k'152 value of ScAIN films makes it possible to improve signal to noise ratio. In this study, the streptavidin-biotin interactions were monitored by using the c-axis tilted ScAlN film quasi-shear mode resonators.

Original language	English
Title of host publication	2018 IEEE International Ultrasonics Symposium, IUS 2018
Publisher	IEEE Computer Society
ISBN (Electronic)	9781538634257
DOIs	https://doi.org/10.1109/ULTSYM.2018.8580191
Publication status	Published - 2018 Dec 17
Event	2018 IEEE International Ultrasonics Symposium, IUS 2018 - Kobe, Japan Duration: 2018 Oct 22 → 2018 Oct 25

Publication series

Name	IEEE International Ultrasonics Symposium, IUS
Volume	2018-October
ISSN (Print)	1948-5719
ISSN (Electronic)	1948-5727

Other

Other	2018 IEEE International Ultrasonics Symposium, IUS 2018
Country	Japan
City	Kobe
Period	18/10/22 → 18/10/25

Fingerprint

Keywords

QCM
ScA1N
TSM
biosensor

ASJC Scopus subject areas

Acoustics and Ultrasonics

Cite this

Yazaki, H., Soutome, T., Karasawa, R., Takayanagi, S., Yoshida, K., & Yanagitani, T. (2018). C-Axis Tilted ScAIN Film Shear Mode Resonators for Biosensing. In 2018 IEEE International Ultrasonics Symposium, IUS 2018 [8580191] (IEEE International Ultrasonics Symposium, IUS; Vol. 2018-October). IEEE Computer Society. https://doi.org/10.1109/ULTSYM.2018.8580191

C-Axis Tilted ScAIN Film Shear Mode Resonators for Biosensing. / Yazaki, Hana; Soutome, Takumi; Karasawa, Rei; Takayanagi, Shinji; Yoshida, Kenji; Yanagitani, Takahiko.

2018 IEEE International Ultrasonics Symposium, IUS 2018. IEEE Computer Society, 2018. 8580191 (IEEE International Ultrasonics Symposium, IUS; Vol. 2018-October).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Yazaki, H, Soutome, T, Karasawa, R, Takayanagi, S, Yoshida, K & Yanagitani, T 2018, C-Axis Tilted ScAIN Film Shear Mode Resonators for Biosensing. in 2018 IEEE International Ultrasonics Symposium, IUS 2018., 8580191, IEEE International Ultrasonics Symposium, IUS, vol. 2018-October, IEEE Computer Society, 2018 IEEE International Ultrasonics Symposium, IUS 2018, Kobe, Japan, 18/10/22. https://doi.org/10.1109/ULTSYM.2018.8580191

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Access to Document

10.1109/ULTSYM.2018.8580191