C-Axis Tilted ScAIN Film Shear Mode Resonators for Biosensing

Hana Yazaki, Takumi Soutome, Rei Karasawa, Shinji Takayanagi, Kenji Yoshida, Takahiko Yanagitani

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Abstract

    Miniature and highly sensitive biosensors are attractive. Quasi-shear mode c-axis tilted ScAIN film resonator is suitable for sensing biomolecules because they can operate in requid. Higher k'152 value of ScAIN films makes it possible to improve signal to noise ratio. In this study, the streptavidin-biotin interactions were monitored by using the c-axis tilted ScAlN film quasi-shear mode resonators.

    Original languageEnglish
    Title of host publication2018 IEEE International Ultrasonics Symposium, IUS 2018
    PublisherIEEE Computer Society
    Volume2018-October
    ISBN (Electronic)9781538634257
    DOIs
    Publication statusPublished - 2018 Dec 17
    Event2018 IEEE International Ultrasonics Symposium, IUS 2018 - Kobe, Japan
    Duration: 2018 Oct 222018 Oct 25

    Other

    Other2018 IEEE International Ultrasonics Symposium, IUS 2018
    CountryJapan
    CityKobe
    Period18/10/2218/10/25

    Fingerprint

    resonators
    shear
    biotin
    bioinstrumentation
    signal to noise ratios
    interactions

    Keywords

    • biosensor
    • QCM
    • ScA1N
    • TSM

    ASJC Scopus subject areas

    • Acoustics and Ultrasonics

    Cite this

    Yazaki, H., Soutome, T., Karasawa, R., Takayanagi, S., Yoshida, K., & Yanagitani, T. (2018). C-Axis Tilted ScAIN Film Shear Mode Resonators for Biosensing. In 2018 IEEE International Ultrasonics Symposium, IUS 2018 (Vol. 2018-October). [8580191] IEEE Computer Society. https://doi.org/10.1109/ULTSYM.2018.8580191

    C-Axis Tilted ScAIN Film Shear Mode Resonators for Biosensing. / Yazaki, Hana; Soutome, Takumi; Karasawa, Rei; Takayanagi, Shinji; Yoshida, Kenji; Yanagitani, Takahiko.

    2018 IEEE International Ultrasonics Symposium, IUS 2018. Vol. 2018-October IEEE Computer Society, 2018. 8580191.

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Yazaki, H, Soutome, T, Karasawa, R, Takayanagi, S, Yoshida, K & Yanagitani, T 2018, C-Axis Tilted ScAIN Film Shear Mode Resonators for Biosensing. in 2018 IEEE International Ultrasonics Symposium, IUS 2018. vol. 2018-October, 8580191, IEEE Computer Society, 2018 IEEE International Ultrasonics Symposium, IUS 2018, Kobe, Japan, 18/10/22. https://doi.org/10.1109/ULTSYM.2018.8580191
    Yazaki H, Soutome T, Karasawa R, Takayanagi S, Yoshida K, Yanagitani T. C-Axis Tilted ScAIN Film Shear Mode Resonators for Biosensing. In 2018 IEEE International Ultrasonics Symposium, IUS 2018. Vol. 2018-October. IEEE Computer Society. 2018. 8580191 https://doi.org/10.1109/ULTSYM.2018.8580191
    Yazaki, Hana ; Soutome, Takumi ; Karasawa, Rei ; Takayanagi, Shinji ; Yoshida, Kenji ; Yanagitani, Takahiko. / C-Axis Tilted ScAIN Film Shear Mode Resonators for Biosensing. 2018 IEEE International Ultrasonics Symposium, IUS 2018. Vol. 2018-October IEEE Computer Society, 2018.
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