TY - GEN
T1 - C-Axis Tilted ScAIN Film Shear Mode Resonators for Biosensing
AU - Yazaki, Hana
AU - Soutome, Takumi
AU - Karasawa, Rei
AU - Takayanagi, Shinji
AU - Yoshida, Kenji
AU - Yanagitani, Takahiko
N1 - Publisher Copyright:
© 2018 IEEE.
PY - 2018/12/17
Y1 - 2018/12/17
N2 - Miniature and highly sensitive biosensors are attractive. Quasi-shear mode c-axis tilted ScAIN film resonator is suitable for sensing biomolecules because they can operate in requid. Higher k'152 value of ScAIN films makes it possible to improve signal to noise ratio. In this study, the streptavidin-biotin interactions were monitored by using the c-axis tilted ScAlN film quasi-shear mode resonators.
AB - Miniature and highly sensitive biosensors are attractive. Quasi-shear mode c-axis tilted ScAIN film resonator is suitable for sensing biomolecules because they can operate in requid. Higher k'152 value of ScAIN films makes it possible to improve signal to noise ratio. In this study, the streptavidin-biotin interactions were monitored by using the c-axis tilted ScAlN film quasi-shear mode resonators.
KW - QCM
KW - ScA1N
KW - TSM
KW - biosensor
UR - http://www.scopus.com/inward/record.url?scp=85060635947&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85060635947&partnerID=8YFLogxK
U2 - 10.1109/ULTSYM.2018.8580191
DO - 10.1109/ULTSYM.2018.8580191
M3 - Conference contribution
AN - SCOPUS:85060635947
T3 - IEEE International Ultrasonics Symposium, IUS
BT - 2018 IEEE International Ultrasonics Symposium, IUS 2018
PB - IEEE Computer Society
T2 - 2018 IEEE International Ultrasonics Symposium, IUS 2018
Y2 - 22 October 2018 through 25 October 2018
ER -