@inproceedings{6210dbe32ba848d3878f7e3b631b6d88,
title = "C-Axis Tilted ScAIN Film Shear Mode Resonators for Biosensing",
abstract = "Miniature and highly sensitive biosensors are attractive. Quasi-shear mode c-axis tilted ScAIN film resonator is suitable for sensing biomolecules because they can operate in requid. Higher k'152 value of ScAIN films makes it possible to improve signal to noise ratio. In this study, the streptavidin-biotin interactions were monitored by using the c-axis tilted ScAlN film quasi-shear mode resonators.",
keywords = "QCM, ScA1N, TSM, biosensor",
author = "Hana Yazaki and Takumi Soutome and Rei Karasawa and Shinji Takayanagi and Kenji Yoshida and Takahiko Yanagitani",
year = "2018",
month = dec,
day = "17",
doi = "10.1109/ULTSYM.2018.8580191",
language = "English",
series = "IEEE International Ultrasonics Symposium, IUS",
publisher = "IEEE Computer Society",
booktitle = "2018 IEEE International Ultrasonics Symposium, IUS 2018",
note = "2018 IEEE International Ultrasonics Symposium, IUS 2018 ; Conference date: 22-10-2018 Through 25-10-2018",
}