C-Axis zig-zag polarization inverted ScAlN multilayer for FBAR transformer rectifying antenna

Rei Karasawa, Takahiko Yanagitani

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    3 Citations (Scopus)

    Abstract

    Enegy harvesting from surrounding electromagnetic wave have attracted much attention in recent years. Low RF-DC conversion efficiency in the rectenna due to a weak power of electromagnetic wave is a problem. We here report the new type of polarization inverted FBAR transformer for RF amplification in the rectenna. c-Axis zig-zag polarization inverted 12 layer ScAlN was fabricated by glancing sputtering deposition. The 12 layer ScAlN HBAR clearly excites 12th-order shear mode of 1.4 dB at 612 MHz. c-Axis tilt angle of the layers was determined to be 40-45 degrees by an XRD pole figure. This new type of device is promising for high efficiency RF-DC conversion in the rectenna.

    Original languageEnglish
    Title of host publication2017 IEEE International Ultrasonics Symposium, IUS 2017
    PublisherIEEE Computer Society
    ISBN (Electronic)9781538633830
    DOIs
    Publication statusPublished - 2017 Oct 31
    Event2017 IEEE International Ultrasonics Symposium, IUS 2017 - Washington, United States
    Duration: 2017 Sep 62017 Sep 9

    Other

    Other2017 IEEE International Ultrasonics Symposium, IUS 2017
    CountryUnited States
    CityWashington
    Period17/9/617/9/9

    Keywords

    • C-axis tilted films
    • Porarization inverted multilayer films
    • Rectenna
    • ScAlN
    • Shear mode

    ASJC Scopus subject areas

    • Acoustics and Ultrasonics

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  • Cite this

    Karasawa, R., & Yanagitani, T. (2017). C-Axis zig-zag polarization inverted ScAlN multilayer for FBAR transformer rectifying antenna. In 2017 IEEE International Ultrasonics Symposium, IUS 2017 [8091618] IEEE Computer Society. https://doi.org/10.1109/ULTSYM.2017.8091618