C-Axis zig-zag polarization inverted ScAlN multilayer for FBAR transformer rectifying antenna

Rei Karasawa, Takahiko Yanagitani

Research output: Chapter in Book/Report/Conference proceedingConference contribution

7 Citations (Scopus)

Abstract

Enegy harvesting from surrounding electromagnetic wave have attracted much attention in recent years. Low RF-DC conversion efficiency in the rectenna due to a weak power of electromagnetic wave is a problem. We here report the new type of polarization inverted FBAR transformer for RF amplification in the rectenna. c-Axis zig-zag polarization inverted 12 layer ScAlN was fabricated by glancing sputtering deposition. The 12 layer ScAlN HBAR clearly excites 12th-order shear mode of 1.4 dB at 612 MHz. c-Axis tilt angle of the layers was determined to be 40-45 degrees by an XRD pole figure. This new type of device is promising for high efficiency RF-DC conversion in the rectenna.

Original languageEnglish
Title of host publication2017 IEEE International Ultrasonics Symposium, IUS 2017
PublisherIEEE Computer Society
ISBN (Electronic)9781538633830
DOIs
Publication statusPublished - 2017 Oct 31
Event2017 IEEE International Ultrasonics Symposium, IUS 2017 - Washington, United States
Duration: 2017 Sep 62017 Sep 9

Publication series

NameIEEE International Ultrasonics Symposium, IUS
ISSN (Print)1948-5719
ISSN (Electronic)1948-5727

Other

Other2017 IEEE International Ultrasonics Symposium, IUS 2017
Country/TerritoryUnited States
CityWashington
Period17/9/617/9/9

Keywords

  • C-axis tilted films
  • Porarization inverted multilayer films
  • Rectenna
  • ScAlN
  • Shear mode

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

Fingerprint

Dive into the research topics of 'C-Axis zig-zag polarization inverted ScAlN multilayer for FBAR transformer rectifying antenna'. Together they form a unique fingerprint.

Cite this