C-Axis zig-zag polarization inverted ScAlN multilayer for FBAR transformer rectifying antenna

Rei Karasawa, Takahiko Yanagitani

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    3 Citations (Scopus)

    Abstract

    Enegy harvesting from surrounding electromagnetic wave have attracted much attention in recent years. Low RF-DC conversion efficiency in the rectenna due to a weak power of electromagnetic wave is a problem. We here report the new type of polarization inverted FBAR transformer for RF amplification in the rectenna. c-Axis zig-zag polarization inverted 12 layer ScAlN was fabricated by glancing sputtering deposition. The 12 layer ScAlN HBAR clearly excites 12th-order shear mode of 1.4 dB at 612 MHz. c-Axis tilt angle of the layers was determined to be 40-45 degrees by an XRD pole figure. This new type of device is promising for high efficiency RF-DC conversion in the rectenna.

    Original languageEnglish
    Title of host publication2017 IEEE International Ultrasonics Symposium, IUS 2017
    PublisherIEEE Computer Society
    ISBN (Electronic)9781538633830
    DOIs
    Publication statusPublished - 2017 Oct 31
    Event2017 IEEE International Ultrasonics Symposium, IUS 2017 - Washington, United States
    Duration: 2017 Sep 62017 Sep 9

    Other

    Other2017 IEEE International Ultrasonics Symposium, IUS 2017
    CountryUnited States
    CityWashington
    Period17/9/617/9/9

    Fingerprint

    transformers
    antennas
    electromagnetic radiation
    polarization
    direct current
    poles
    sputtering
    shear

    Keywords

    • C-axis tilted films
    • Porarization inverted multilayer films
    • Rectenna
    • ScAlN
    • Shear mode

    ASJC Scopus subject areas

    • Acoustics and Ultrasonics

    Cite this

    Karasawa, R., & Yanagitani, T. (2017). C-Axis zig-zag polarization inverted ScAlN multilayer for FBAR transformer rectifying antenna. In 2017 IEEE International Ultrasonics Symposium, IUS 2017 [8091618] IEEE Computer Society. https://doi.org/10.1109/ULTSYM.2017.8091618

    C-Axis zig-zag polarization inverted ScAlN multilayer for FBAR transformer rectifying antenna. / Karasawa, Rei; Yanagitani, Takahiko.

    2017 IEEE International Ultrasonics Symposium, IUS 2017. IEEE Computer Society, 2017. 8091618.

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Karasawa, R & Yanagitani, T 2017, C-Axis zig-zag polarization inverted ScAlN multilayer for FBAR transformer rectifying antenna. in 2017 IEEE International Ultrasonics Symposium, IUS 2017., 8091618, IEEE Computer Society, 2017 IEEE International Ultrasonics Symposium, IUS 2017, Washington, United States, 17/9/6. https://doi.org/10.1109/ULTSYM.2017.8091618
    Karasawa R, Yanagitani T. C-Axis zig-zag polarization inverted ScAlN multilayer for FBAR transformer rectifying antenna. In 2017 IEEE International Ultrasonics Symposium, IUS 2017. IEEE Computer Society. 2017. 8091618 https://doi.org/10.1109/ULTSYM.2017.8091618
    Karasawa, Rei ; Yanagitani, Takahiko. / C-Axis zig-zag polarization inverted ScAlN multilayer for FBAR transformer rectifying antenna. 2017 IEEE International Ultrasonics Symposium, IUS 2017. IEEE Computer Society, 2017.
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