Carbon nanotube forests as top electrode in electroacoustic resonators

Santiago Esconjauregui, Taron Makaryan, Teona Mirea, Mario DeMiguel-Ramos, Jimena Olivares, Yuzheng Guo, Hisashi Sugime, Lorenzo D'Arsié, Junwei Yang, Sunil Bhardwaj, Cinzia Cepek, John Robertson, Enrique Iborra

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5 Citations (Scopus)

Abstract

We grow carbon nanotube forests on piezoelectric AlN films and fabricate and characterize nanotube-based solidly mounted bulk acoustic wave resonators employing the forests as the top electrode material. The devices show values for quality factor at anti-resonance of ∼430, and at resonance of ∼100. The effective coupling coefficient is of ∼6%, and the resonant frequencies are up to ∼800 MHz above those observed with metallic top electrodes. AlN promotes a strong catalyst-support interaction, which reduces Fe catalyst mobility, and thus enforces the growth of forests by the base growth mechanism.

Original languageEnglish
Article number133106
JournalApplied Physics Letters
Volume107
Issue number13
DOIs
Publication statusPublished - 2015 Sep 28
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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  • Cite this

    Esconjauregui, S., Makaryan, T., Mirea, T., DeMiguel-Ramos, M., Olivares, J., Guo, Y., Sugime, H., D'Arsié, L., Yang, J., Bhardwaj, S., Cepek, C., Robertson, J., & Iborra, E. (2015). Carbon nanotube forests as top electrode in electroacoustic resonators. Applied Physics Letters, 107(13), [133106]. https://doi.org/10.1063/1.4932197