Carbon nanotube forests as top electrode in electroacoustic resonators

Santiago Esconjauregui, Taron Makaryan, Teona Mirea, Mario DeMiguel-Ramos, Jimena Olivares, Yuzheng Guo, Hisashi Sugime, Lorenzo D'Arsié, Junwei Yang, Sunil Bhardwaj, Cinzia Cepek, John Robertson, Enrique Iborra

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5 Citations (Scopus)


We grow carbon nanotube forests on piezoelectric AlN films and fabricate and characterize nanotube-based solidly mounted bulk acoustic wave resonators employing the forests as the top electrode material. The devices show values for quality factor at anti-resonance of ∼430, and at resonance of ∼100. The effective coupling coefficient is of ∼6%, and the resonant frequencies are up to ∼800 MHz above those observed with metallic top electrodes. AlN promotes a strong catalyst-support interaction, which reduces Fe catalyst mobility, and thus enforces the growth of forests by the base growth mechanism.

Original languageEnglish
Article number133106
JournalApplied Physics Letters
Issue number13
Publication statusPublished - 2015 Sep 28
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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  • Cite this

    Esconjauregui, S., Makaryan, T., Mirea, T., DeMiguel-Ramos, M., Olivares, J., Guo, Y., Sugime, H., D'Arsié, L., Yang, J., Bhardwaj, S., Cepek, C., Robertson, J., & Iborra, E. (2015). Carbon nanotube forests as top electrode in electroacoustic resonators. Applied Physics Letters, 107(13), [133106].