Catheter-tip capacitive pressure sensor

Masayoshi Esashi, Shuichi Shoji, Yosinori Matsumoto, Kazuyoshi Furuta

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

As a pressure sensor to be used at the tip of a catheter, a capacitive relative pressure sensor was fabricated. This paper describes the fabrication process and the characteristics of this pressure sensor. The size of the sensor fabricated is 0.7 × 3.5 × 0.8 mm3 and the spacing between the capacitor electrodes is either 1.0 μm or 1.5 μm. The principal features are as follows: (1) In the fabrication of the diaphragm, high-concentration boron was diffused into an Si wafer. The diaphragm thickness was controlled accurately by etch stop; (2) to reduce the effect of the stray capacitance and to increase the S/N ratio of the sensor, the capacitance detection IC was placed near the diaphragm; (3) since the consumption current flows at the oscillation frequency, it is possible to use two lead wires from the sensor; and (4) this IC has a size of 1.2 × 0.5 mm2 and the temperature dependence of the oscillation frequency can be made zero by letting the power supply voltage be 2.24 V. The pressure sensitivity of the obtained sensor is 3.45 × 10-5/mmHg and the temperature coefficient at the zero pressure was 0.17 mmHg/°C. The output of the IC placed by the sensor had a frequency change of about 7 kHz for 1000 mmHg.

Original languageEnglish
Pages (from-to)79-87
Number of pages9
JournalElectronics and Communications in Japan, Part II: Electronics (English translation of Denshi Tsushin Gakkai Ronbunshi)
Volume73
Issue number10
Publication statusPublished - 1990 Oct
Externally publishedYes

Fingerprint

Capacitive sensors
Catheters
Pressure sensors
pressure sensors
diaphragms
Diaphragms
sensors
Sensors
Capacitance
capacitance
Fabrication
oscillations
fabrication
power supplies
Boron
capacitors
boron
Capacitors
spacing
wafers

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this

Catheter-tip capacitive pressure sensor. / Esashi, Masayoshi; Shoji, Shuichi; Matsumoto, Yosinori; Furuta, Kazuyoshi.

In: Electronics and Communications in Japan, Part II: Electronics (English translation of Denshi Tsushin Gakkai Ronbunshi), Vol. 73, No. 10, 10.1990, p. 79-87.

Research output: Contribution to journalArticle

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