Cavity-free micro thermoelectric energy harvester with Si nanowires

T. Watanabe, M. Tomita, Tianzhuo Zhan, K. Shima, Y. Himeda, R. Yamato, T. Matsukawa, T. Matsuki

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We present a new design of silicon-based micro-thermoelectric generator, which utilizes silicon nanowires as the thermoelectric leg. It is driven by a steep temperature gradient exuding around a heat flow perpendicular to the substrate, and the silicon nanowires are not suspended on a cavity etched on the substrate. The power density is scalable by shortening the silicon nanowire to sub-μm length, which was experimentally demonstrated and tens of µW/cm2-class power generation was achieved at an externally applied temperature difference of only 5 K. A numerical discussion shows that the thermoelectric power can be drastically enhanced by suppressing the thermal resistance at the entire substrate. Thus, there is a plenty of room at the micro- or submicrometric scales for realizing thermal energy harvesting devices with high power densities.

Original languageEnglish
Title of host publicationSilicon Compatible Emerging Materials, Processes, and Technologies for Advanced CMOS and Post-CMOS Applications 9
EditorsK. Kakushima, Y. S. Obeng, E. P. Gusev, S. De Gendt, P. J. Timans, Z. Karim, F. Roozeboom, D. Misra, H. Jagannathan
PublisherElectrochemical Society Inc.
Pages95-110
Number of pages16
Edition3
ISBN (Electronic)9781607685395
DOIs
Publication statusPublished - 2019 Jan 1
EventInternational Symposium on Silicon Compatible Emerging Materials, Processes, and Technologies for Advanced CMOS and Post-CMOS Applications 9 - 235th ECS Meeting - Dallas, United States
Duration: 2019 May 262019 May 30

Publication series

NameECS Transactions
Number3
Volume89
ISSN (Print)1938-6737
ISSN (Electronic)1938-5862

Conference

ConferenceInternational Symposium on Silicon Compatible Emerging Materials, Processes, and Technologies for Advanced CMOS and Post-CMOS Applications 9 - 235th ECS Meeting
CountryUnited States
CityDallas
Period19/5/2619/5/30

Fingerprint

Harvesters
Nanowires
Silicon
Substrates
Energy harvesting
Thermoelectric power
Thermal energy
Heat resistance
Thermal gradients
Power generation
Heat transfer
Temperature

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Watanabe, T., Tomita, M., Zhan, T., Shima, K., Himeda, Y., Yamato, R., ... Matsuki, T. (2019). Cavity-free micro thermoelectric energy harvester with Si nanowires. In K. Kakushima, Y. S. Obeng, E. P. Gusev, S. De Gendt, P. J. Timans, Z. Karim, F. Roozeboom, D. Misra, ... H. Jagannathan (Eds.), Silicon Compatible Emerging Materials, Processes, and Technologies for Advanced CMOS and Post-CMOS Applications 9 (3 ed., pp. 95-110). (ECS Transactions; Vol. 89, No. 3). Electrochemical Society Inc.. https://doi.org/10.1149/08903.0095ecst

Cavity-free micro thermoelectric energy harvester with Si nanowires. / Watanabe, T.; Tomita, M.; Zhan, Tianzhuo; Shima, K.; Himeda, Y.; Yamato, R.; Matsukawa, T.; Matsuki, T.

Silicon Compatible Emerging Materials, Processes, and Technologies for Advanced CMOS and Post-CMOS Applications 9. ed. / K. Kakushima; Y. S. Obeng; E. P. Gusev; S. De Gendt; P. J. Timans; Z. Karim; F. Roozeboom; D. Misra; H. Jagannathan. 3. ed. Electrochemical Society Inc., 2019. p. 95-110 (ECS Transactions; Vol. 89, No. 3).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Watanabe, T, Tomita, M, Zhan, T, Shima, K, Himeda, Y, Yamato, R, Matsukawa, T & Matsuki, T 2019, Cavity-free micro thermoelectric energy harvester with Si nanowires. in K Kakushima, YS Obeng, EP Gusev, S De Gendt, PJ Timans, Z Karim, F Roozeboom, D Misra & H Jagannathan (eds), Silicon Compatible Emerging Materials, Processes, and Technologies for Advanced CMOS and Post-CMOS Applications 9. 3 edn, ECS Transactions, no. 3, vol. 89, Electrochemical Society Inc., pp. 95-110, International Symposium on Silicon Compatible Emerging Materials, Processes, and Technologies for Advanced CMOS and Post-CMOS Applications 9 - 235th ECS Meeting, Dallas, United States, 19/5/26. https://doi.org/10.1149/08903.0095ecst
Watanabe T, Tomita M, Zhan T, Shima K, Himeda Y, Yamato R et al. Cavity-free micro thermoelectric energy harvester with Si nanowires. In Kakushima K, Obeng YS, Gusev EP, De Gendt S, Timans PJ, Karim Z, Roozeboom F, Misra D, Jagannathan H, editors, Silicon Compatible Emerging Materials, Processes, and Technologies for Advanced CMOS and Post-CMOS Applications 9. 3 ed. Electrochemical Society Inc. 2019. p. 95-110. (ECS Transactions; 3). https://doi.org/10.1149/08903.0095ecst
Watanabe, T. ; Tomita, M. ; Zhan, Tianzhuo ; Shima, K. ; Himeda, Y. ; Yamato, R. ; Matsukawa, T. ; Matsuki, T. / Cavity-free micro thermoelectric energy harvester with Si nanowires. Silicon Compatible Emerging Materials, Processes, and Technologies for Advanced CMOS and Post-CMOS Applications 9. editor / K. Kakushima ; Y. S. Obeng ; E. P. Gusev ; S. De Gendt ; P. J. Timans ; Z. Karim ; F. Roozeboom ; D. Misra ; H. Jagannathan. 3. ed. Electrochemical Society Inc., 2019. pp. 95-110 (ECS Transactions; 3).
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