CD SEM calibration to TEM for accurate metrology of FINs in MuGFET devices

G. F. Lorusso*, N. Collaert, R. Rooyackers, M. Ercken, I. Pollentier, S. Cheng, B. Degroote, M. Jurczak, S. Biesemans, O. Richard, H. Bender, A. Azordegan, R. Kuppa, S. Shirke, J. Prochazka, Timothy Edward Long

*Corresponding author for this work

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Engineering & Materials Science