Challenge for STM observation of dopant activation process on Si(001): In-situ ion irradiation and hydrogenation

Takefumi Kamioka, Fumiya Isono, Takahiro Yoshida, Iwao Ohdomari, Takanobu Watanabe

Research output: Contribution to journalArticlepeer-review

Fingerprint Dive into the research topics of 'Challenge for STM observation of dopant activation process on Si(001): In-situ ion irradiation and hydrogenation'. Together they form a unique fingerprint.

Physics & Astronomy