Change in structure and TFT performances of IZOJGO and IGZO films by crystallization

Suko Ayaka, Junjun Jia, Nakamura Shinichi, Shigesato Yuzo

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

How the a-IGZO films crystallize and how the crystallinity affects the electrical properties, hence the TFT performances, have been investigated in detail. a-IGZO thin films were post-annealed in air at 300-1000 °C for 1h. HREM analyses revealed the crystallization behavior in detail. For the comparative purpose the crystallization behaviors of a-IGO and a-IZO films are also investigated.

Original languageEnglish
Title of host publication22nd International Display Workshops, IDW 2015
PublisherInternational Display Workshops
Pages524-525
Number of pages2
ISBN (Electronic)9781510845503
Publication statusPublished - 2015 Jan 1
Externally publishedYes
Event22nd International Display Workshops, IDW 2015 - Otsu, Japan
Duration: 2015 Dec 92015 Dec 11

Publication series

NameProceedings of the International Display Workshops
Volume1
ISSN (Print)1883-2490

Conference

Conference22nd International Display Workshops, IDW 2015
CountryJapan
CityOtsu
Period15/12/915/12/11

Fingerprint

Crystallization
High resolution electron microscopy
Electric properties
Air
Thin films

Keywords

  • Crystal
  • IGO
  • IGZO
  • IZO
  • Oxide-semiconductor

ASJC Scopus subject areas

  • Computer Vision and Pattern Recognition
  • Human-Computer Interaction
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Radiology Nuclear Medicine and imaging

Cite this

Ayaka, S., Jia, J., Shinichi, N., & Yuzo, S. (2015). Change in structure and TFT performances of IZOJGO and IGZO films by crystallization. In 22nd International Display Workshops, IDW 2015 (pp. 524-525). (Proceedings of the International Display Workshops; Vol. 1). International Display Workshops.

Change in structure and TFT performances of IZOJGO and IGZO films by crystallization. / Ayaka, Suko; Jia, Junjun; Shinichi, Nakamura; Yuzo, Shigesato.

22nd International Display Workshops, IDW 2015. International Display Workshops, 2015. p. 524-525 (Proceedings of the International Display Workshops; Vol. 1).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Ayaka, S, Jia, J, Shinichi, N & Yuzo, S 2015, Change in structure and TFT performances of IZOJGO and IGZO films by crystallization. in 22nd International Display Workshops, IDW 2015. Proceedings of the International Display Workshops, vol. 1, International Display Workshops, pp. 524-525, 22nd International Display Workshops, IDW 2015, Otsu, Japan, 15/12/9.
Ayaka S, Jia J, Shinichi N, Yuzo S. Change in structure and TFT performances of IZOJGO and IGZO films by crystallization. In 22nd International Display Workshops, IDW 2015. International Display Workshops. 2015. p. 524-525. (Proceedings of the International Display Workshops).
Ayaka, Suko ; Jia, Junjun ; Shinichi, Nakamura ; Yuzo, Shigesato. / Change in structure and TFT performances of IZOJGO and IGZO films by crystallization. 22nd International Display Workshops, IDW 2015. International Display Workshops, 2015. pp. 524-525 (Proceedings of the International Display Workshops).
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