Change in structure and TFT performances of IZOJGO and IGZO films by crystallization

Suko Ayaka, Junjun Jia, Nakamura Shinichi, Shigesato Yuzo

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

How the a-IGZO films crystallize and how the crystallinity affects the electrical properties, hence the TFT performances, have been investigated in detail. a-IGZO thin films were post-annealed in air at 300-1000 °C for 1h. HREM analyses revealed the crystallization behavior in detail. For the comparative purpose the crystallization behaviors of a-IGO and a-IZO films are also investigated.

Original languageEnglish
Title of host publication22nd International Display Workshops, IDW 2015
PublisherInternational Display Workshops
Pages524-525
Number of pages2
ISBN (Electronic)9781510845503
Publication statusPublished - 2015 Jan 1
Externally publishedYes
Event22nd International Display Workshops, IDW 2015 - Otsu, Japan
Duration: 2015 Dec 92015 Dec 11

Publication series

NameProceedings of the International Display Workshops
Volume1
ISSN (Print)1883-2490

Conference

Conference22nd International Display Workshops, IDW 2015
CountryJapan
CityOtsu
Period15/12/915/12/11

Keywords

  • Crystal
  • IGO
  • IGZO
  • IZO
  • Oxide-semiconductor

ASJC Scopus subject areas

  • Computer Vision and Pattern Recognition
  • Human-Computer Interaction
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Radiology Nuclear Medicine and imaging

Fingerprint Dive into the research topics of 'Change in structure and TFT performances of IZOJGO and IGZO films by crystallization'. Together they form a unique fingerprint.

Cite this