Characteristic impedance determination technique for CMOS on-wafer transmission line with large substrate loss

Kyoya Takano, Shuhei Amakawa, Kosuke Katayama, Mizuki Motoyoshi, Minoru Fujishima

Research output: Chapter in Book/Report/Conference proceedingConference contribution

8 Citations (Scopus)

Abstract

A characteristic impedance determination technique that can be used in the CMOS process with a large substrate loss is proposed. Furthermore, it is shown using image parameters that the propagation constant is obtained directly from Thru and Line without determining error networks. The validity of the characteristic impedance obtained by the proposed method is shown using the measurement and EM simulation results. The calibration patterns used for the validation check were fabricated using the 40 nm CMOS process.

Original languageEnglish
Title of host publication79th ARFTG Microwave Measurement Conference
Subtitle of host publicationNon-Linear Measurement Systems, ARFTG 2012
DOIs
Publication statusPublished - 2012 Oct 29
Externally publishedYes
Event79th ARFTG Microwave Measurement Conference: Non-Linear Measurement Systems, ARFTG 2012 - Montreal, QC, Canada
Duration: 2012 Jun 222012 Jun 22

Publication series

Name79th ARFTG Microwave Measurement Conference: Non-Linear Measurement Systems, ARFTG 2012

Other

Other79th ARFTG Microwave Measurement Conference: Non-Linear Measurement Systems, ARFTG 2012
CountryCanada
CityMontreal, QC
Period12/6/2212/6/22

Keywords

  • CMOS
  • characteristic impedance
  • distributed constant circuit model
  • on-wafer measurement
  • transmission line

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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  • Cite this

    Takano, K., Amakawa, S., Katayama, K., Motoyoshi, M., & Fujishima, M. (2012). Characteristic impedance determination technique for CMOS on-wafer transmission line with large substrate loss. In 79th ARFTG Microwave Measurement Conference: Non-Linear Measurement Systems, ARFTG 2012 [6291203] (79th ARFTG Microwave Measurement Conference: Non-Linear Measurement Systems, ARFTG 2012). https://doi.org/10.1109/ARFTG79.2012.6291203