Characteristics of altered layers formed by sputtering with a massive molecular ion containing diverse elements with large mass differences

Yukio Fujiwara, Kouji Kondou, Hidehiko Nonaka, Naoaki Saito, Toshiyuki Fujimoto, Akira Kurokawa, Shingo Ichimura, Mitsuhiro Tomita

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

Tetrairidium dodecacarbonyl (Ir4 (CO)12) is an organometallic compound called metal cluster complex which has a molecular weight of 1104.9. To investigate its irradiation effect, silicon substrates sputtered with 10 keV Ir4 (CO) 7+ were analyzed by high resolution Rutherford backscattering spectrometry. Experimental results were examined on the basis of a conventional theory of simultaneous implantation and sputtering. The introduction of oxygen gas during sputtering proved to form a thick oxide layer in the substrate, resulting in iridium segregation at the silicon-oxide interface and carbon accumulation near the surface. It was confirmed that oxygen partial pressure significantly affected the characteristics of an altered layer beneath a sputtered surface.

Original languageEnglish
Article number073509
JournalJournal of Applied Physics
Volume102
Issue number7
DOIs
Publication statusPublished - 2007 Oct 22
Externally publishedYes

Fingerprint

molecular ions
sputtering
organometallic compounds
oxygen
metal clusters
iridium
silicon oxides
partial pressure
molecular weight
implantation
backscattering
irradiation
oxides
carbon
high resolution
silicon
gases
spectroscopy

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Cite this

Characteristics of altered layers formed by sputtering with a massive molecular ion containing diverse elements with large mass differences. / Fujiwara, Yukio; Kondou, Kouji; Nonaka, Hidehiko; Saito, Naoaki; Fujimoto, Toshiyuki; Kurokawa, Akira; Ichimura, Shingo; Tomita, Mitsuhiro.

In: Journal of Applied Physics, Vol. 102, No. 7, 073509, 22.10.2007.

Research output: Contribution to journalArticle

Fujiwara, Yukio ; Kondou, Kouji ; Nonaka, Hidehiko ; Saito, Naoaki ; Fujimoto, Toshiyuki ; Kurokawa, Akira ; Ichimura, Shingo ; Tomita, Mitsuhiro. / Characteristics of altered layers formed by sputtering with a massive molecular ion containing diverse elements with large mass differences. In: Journal of Applied Physics. 2007 ; Vol. 102, No. 7.
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