Characteristics of altered layers formed by sputtering with a massive molecular ion containing diverse elements with large mass differences

Yukio Fujiwara*, Kouji Kondou, Hidehiko Nonaka, Naoaki Saito, Toshiyuki Fujimoto, Akira Kurokawa, Shingo Ichimura, Mitsuhiro Tomita

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)

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Physics & Astronomy