@article{3301bc9f38034cfda529d7589385046a,
title = "Characteristics of molybdenum thin-film plate oscillators fabricated by minimum deformation micromachining",
keywords = "Fabrication, Micro actuator",
author = "Kenji Miyazaki and Noriyoshi Yamauchi and Tomoko Hisaki and Ryouichi Takahashi and Kiyoshi Itao",
year = "1997",
month = mar,
day = "1",
language = "English",
volume = "31",
pages = "53--54",
journal = "International Journal of the Japan Society for Precision Engineering",
issn = "0916-782X",
publisher = "Japan Society for Precision Engineering",
number = "1",
}