Characteristics of molybdenum thin-film plate oscillators fabricated by minimum deformation micromachining

Kenji Miyazaki, Noriyoshi Yamauchi, Tomoko Hisaki, Ryouichi Takahashi, Kiyoshi Itao

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)53-54
Number of pages2
JournalInternational Journal of the Japan Society for Precision Engineering
Volume31
Issue number1
Publication statusPublished - 1997 Mar
Externally publishedYes

Fingerprint

Micromachining
Molybdenum
Fabrication
Thin films

Keywords

  • Fabrication
  • Micro actuator

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Characteristics of molybdenum thin-film plate oscillators fabricated by minimum deformation micromachining. / Miyazaki, Kenji; Yamauchi, Noriyoshi; Hisaki, Tomoko; Takahashi, Ryouichi; Itao, Kiyoshi.

In: International Journal of the Japan Society for Precision Engineering, Vol. 31, No. 1, 03.1997, p. 53-54.

Research output: Contribution to journalArticle

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